3/14/2012	10:21:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2012	10:21:57 AM	Recipe started at 10:21 AM
3/14/2012	10:21:57 AM	Helium valve closed
3/14/2012	10:21:57 AM	H2 valve closed
3/14/2012	10:21:57 AM	BCl3 valve closed
3/14/2012	10:21:57 AM	PH3 valve closed
3/14/2012	10:21:57 AM	SiCl4 pre valve closed
3/14/2012	10:21:57 AM	SiCl4 post valve closed
3/14/2012	10:21:57 AM	Main Vac valve closed
3/14/2012	10:21:57 AM	Bypass valve closed
3/14/2012	10:21:57 AM	Bubbler valve closed
3/14/2012	10:21:57 AM	Helium MFC set to  0.000000
3/14/2012	10:21:57 AM	H2 MFC set to  0.000000
3/14/2012	10:21:57 AM	BCl3 MFC set to  0.000000
3/14/2012	10:21:57 AM	PH3 MFC set to  0.000000
3/14/2012	10:21:57 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:21:57 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:21:57 AM	Tube furnace set to 0
3/14/2012	10:22:00 AM	H2 valve closed
3/14/2012	10:22:00 AM	BCl3 valve closed
3/14/2012	10:22:00 AM	PH3 valve closed
3/14/2012	10:22:00 AM	SiCl4 pre valve closed
3/14/2012	10:22:01 AM	SiCl4 post valve closed
3/14/2012	10:22:01 AM	Main Vac valve closed
3/14/2012	10:22:01 AM	Bypass valve closed
3/14/2012	10:22:01 AM	Bubbler valve closed
3/14/2012	10:22:01 AM	Helium valve opened
3/14/2012	10:22:01 AM	Helium MFC set to  500.000000
3/14/2012	10:22:01 AM	H2 MFC set to  0.000000
3/14/2012	10:22:01 AM	BCl3 MFC set to  0.000000
3/14/2012	10:22:01 AM	PH3 MFC set to  0.000000
3/14/2012	10:22:01 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:22:01 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:22:01 AM	Tube furnace set to 0
3/14/2012	10:23:05 AM	Helium valve closed
3/14/2012	10:23:05 AM	H2 valve closed
3/14/2012	10:23:05 AM	BCl3 valve closed
3/14/2012	10:23:05 AM	PH3 valve closed
3/14/2012	10:23:05 AM	SiCl4 pre valve closed
3/14/2012	10:23:05 AM	SiCl4 post valve closed
3/14/2012	10:23:05 AM	Main Vac valve closed
3/14/2012	10:23:05 AM	Bypass valve closed
3/14/2012	10:23:05 AM	Bubbler valve closed
3/14/2012	10:23:05 AM	Helium MFC set to  0.000000
3/14/2012	10:23:05 AM	H2 MFC set to  0.000000
3/14/2012	10:23:05 AM	BCl3 MFC set to  0.000000
3/14/2012	10:23:05 AM	PH3 MFC set to  0.000000
3/14/2012	10:23:05 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:23:05 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:23:06 AM	Tube furnace set to 0
3/14/2012	10:23:07 AM	Run finished at 10:23 AM
3/14/2012	10:23:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2012	10:26:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2012	10:26:13 AM	Recipe started at 10:26 AM
3/14/2012	10:26:13 AM	Helium valve closed
3/14/2012	10:26:13 AM	H2 valve closed
3/14/2012	10:26:13 AM	BCl3 valve closed
3/14/2012	10:26:13 AM	PH3 valve closed
3/14/2012	10:26:13 AM	SiCl4 pre valve closed
3/14/2012	10:26:13 AM	SiCl4 post valve closed
3/14/2012	10:26:13 AM	Main Vac valve closed
3/14/2012	10:26:13 AM	Bubbler valve closed
3/14/2012	10:26:13 AM	Bypass valve opened
3/14/2012	10:26:13 AM	Helium MFC set to  0.000000
3/14/2012	10:26:13 AM	H2 MFC set to  0.000000
3/14/2012	10:26:13 AM	BCl3 MFC set to  0.000000
3/14/2012	10:26:13 AM	PH3 MFC set to  0.000000
3/14/2012	10:26:13 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:26:13 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:26:13 AM	Tube furnace set to 0
3/14/2012	10:27:15 AM	Helium valve closed
3/14/2012	10:27:15 AM	H2 valve closed
3/14/2012	10:27:15 AM	BCl3 valve closed
3/14/2012	10:27:15 AM	PH3 valve closed
3/14/2012	10:27:15 AM	SiCl4 pre valve closed
3/14/2012	10:27:15 AM	SiCl4 post valve closed
3/14/2012	10:27:15 AM	Main Vac valve closed
3/14/2012	10:27:15 AM	Bubbler valve closed
3/14/2012	10:27:15 AM	Bypass valve opened
3/14/2012	10:27:15 AM	Helium MFC set to  0.000000
3/14/2012	10:27:15 AM	H2 MFC set to  0.000000
3/14/2012	10:27:15 AM	BCl3 MFC set to  0.000000
3/14/2012	10:27:15 AM	PH3 MFC set to  0.000000
3/14/2012	10:27:15 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:27:15 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:27:15 AM	Tube furnace set to 0
3/14/2012	10:28:15 AM	Helium valve closed
3/14/2012	10:28:15 AM	H2 valve closed
3/14/2012	10:28:15 AM	BCl3 valve closed
3/14/2012	10:28:15 AM	PH3 valve closed
3/14/2012	10:28:15 AM	SiCl4 pre valve closed
3/14/2012	10:28:15 AM	SiCl4 post valve closed
3/14/2012	10:28:15 AM	Bypass valve closed
3/14/2012	10:28:15 AM	Bubbler valve closed
3/14/2012	10:28:15 AM	Main Vac valve opened
3/14/2012	10:28:15 AM	Helium MFC set to  0.000000
3/14/2012	10:28:15 AM	H2 MFC set to  0.000000
3/14/2012	10:28:15 AM	BCl3 MFC set to  0.000000
3/14/2012	10:28:15 AM	PH3 MFC set to  0.000000
3/14/2012	10:28:15 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:28:15 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:28:15 AM	Tube furnace set to 0
3/14/2012	10:28:16 AM	Run finished at 10:28 AM
3/14/2012	10:28:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2012	10:36:37 AM	Recipe started at 10:36 AM
3/14/2012	10:36:37 AM	Helium valve closed
3/14/2012	10:36:37 AM	H2 valve closed
3/14/2012	10:36:37 AM	BCl3 valve closed
3/14/2012	10:36:37 AM	PH3 valve closed
3/14/2012	10:36:37 AM	SiCl4 pre valve closed
3/14/2012	10:36:37 AM	SiCl4 post valve closed
3/14/2012	10:36:37 AM	Bypass valve closed
3/14/2012	10:36:37 AM	Bubbler valve closed
3/14/2012	10:36:37 AM	Main Vac valve opened
3/14/2012	10:36:37 AM	Helium MFC set to  0.000000
3/14/2012	10:36:37 AM	H2 MFC set to  0.000000
3/14/2012	10:36:37 AM	BCl3 MFC set to  0.000000
3/14/2012	10:36:37 AM	PH3 MFC set to  0.000000
3/14/2012	10:36:37 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:36:37 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:36:37 AM	Tube furnace set to 150
3/14/2012	10:37:07 AM	H2 valve closed
3/14/2012	10:37:07 AM	BCl3 valve closed
3/14/2012	10:37:07 AM	PH3 valve closed
3/14/2012	10:37:07 AM	SiCl4 pre valve closed
3/14/2012	10:37:07 AM	SiCl4 post valve closed
3/14/2012	10:37:07 AM	Bypass valve closed
3/14/2012	10:37:07 AM	Bubbler valve closed
3/14/2012	10:37:07 AM	Helium valve opened
3/14/2012	10:37:07 AM	Main Vac valve opened
3/14/2012	10:37:07 AM	Helium MFC set to  20.000000
3/14/2012	10:37:07 AM	H2 MFC set to  0.000000
3/14/2012	10:37:07 AM	BCl3 MFC set to  0.000000
3/14/2012	10:37:07 AM	PH3 MFC set to  0.000000
3/14/2012	10:37:07 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:37:07 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:37:07 AM	Tube furnace set to 150
3/14/2012	10:37:38 AM	Helium valve closed
3/14/2012	10:37:38 AM	H2 valve closed
3/14/2012	10:37:38 AM	BCl3 valve closed
3/14/2012	10:37:38 AM	PH3 valve closed
3/14/2012	10:37:38 AM	SiCl4 pre valve closed
3/14/2012	10:37:38 AM	SiCl4 post valve closed
3/14/2012	10:37:38 AM	Bypass valve closed
3/14/2012	10:37:38 AM	Bubbler valve closed
3/14/2012	10:37:38 AM	Main Vac valve opened
3/14/2012	10:37:38 AM	Helium MFC set to  0.000000
3/14/2012	10:37:38 AM	H2 MFC set to  0.000000
3/14/2012	10:37:38 AM	BCl3 MFC set to  0.000000
3/14/2012	10:37:38 AM	PH3 MFC set to  0.000000
3/14/2012	10:37:38 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:37:38 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:37:38 AM	Tube furnace set to 150
3/14/2012	10:38:08 AM	H2 valve closed
3/14/2012	10:38:08 AM	BCl3 valve closed
3/14/2012	10:38:08 AM	PH3 valve closed
3/14/2012	10:38:08 AM	SiCl4 pre valve closed
3/14/2012	10:38:08 AM	SiCl4 post valve closed
3/14/2012	10:38:08 AM	Bypass valve closed
3/14/2012	10:38:08 AM	Bubbler valve closed
3/14/2012	10:38:08 AM	Helium valve opened
3/14/2012	10:38:08 AM	Main Vac valve opened
3/14/2012	10:38:08 AM	Helium MFC set to  20.000000
3/14/2012	10:38:08 AM	H2 MFC set to  0.000000
3/14/2012	10:38:08 AM	BCl3 MFC set to  0.000000
3/14/2012	10:38:08 AM	PH3 MFC set to  0.000000
3/14/2012	10:38:08 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:38:08 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:38:08 AM	Tube furnace set to 150
3/14/2012	10:38:38 AM	Helium valve closed
3/14/2012	10:38:38 AM	H2 valve closed
3/14/2012	10:38:38 AM	BCl3 valve closed
3/14/2012	10:38:38 AM	PH3 valve closed
3/14/2012	10:38:38 AM	SiCl4 pre valve closed
3/14/2012	10:38:38 AM	SiCl4 post valve closed
3/14/2012	10:38:38 AM	Bypass valve closed
3/14/2012	10:38:38 AM	Bubbler valve closed
3/14/2012	10:38:38 AM	Main Vac valve opened
3/14/2012	10:38:38 AM	Helium MFC set to  0.000000
3/14/2012	10:38:38 AM	H2 MFC set to  0.000000
3/14/2012	10:38:38 AM	BCl3 MFC set to  0.000000
3/14/2012	10:38:38 AM	PH3 MFC set to  0.000000
3/14/2012	10:38:38 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:38:38 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:38:38 AM	Tube furnace set to 150
3/14/2012	10:39:08 AM	H2 valve closed
3/14/2012	10:39:08 AM	BCl3 valve closed
3/14/2012	10:39:08 AM	PH3 valve closed
3/14/2012	10:39:08 AM	SiCl4 pre valve closed
3/14/2012	10:39:08 AM	SiCl4 post valve closed
3/14/2012	10:39:08 AM	Bypass valve closed
3/14/2012	10:39:08 AM	Bubbler valve closed
3/14/2012	10:39:08 AM	Helium valve opened
3/14/2012	10:39:08 AM	Main Vac valve opened
3/14/2012	10:39:08 AM	Helium MFC set to  20.000000
3/14/2012	10:39:08 AM	H2 MFC set to  0.000000
3/14/2012	10:39:08 AM	BCl3 MFC set to  0.000000
3/14/2012	10:39:08 AM	PH3 MFC set to  0.000000
3/14/2012	10:39:08 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:39:08 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:39:08 AM	Tube furnace set to 150
3/14/2012	10:39:38 AM	Helium valve closed
3/14/2012	10:39:38 AM	H2 valve closed
3/14/2012	10:39:38 AM	BCl3 valve closed
3/14/2012	10:39:38 AM	PH3 valve closed
3/14/2012	10:39:38 AM	SiCl4 pre valve closed
3/14/2012	10:39:38 AM	SiCl4 post valve closed
3/14/2012	10:39:38 AM	Bypass valve closed
3/14/2012	10:39:38 AM	Bubbler valve closed
3/14/2012	10:39:38 AM	Main Vac valve opened
3/14/2012	10:39:38 AM	Helium MFC set to  0.000000
3/14/2012	10:39:38 AM	H2 MFC set to  0.000000
3/14/2012	10:39:38 AM	BCl3 MFC set to  0.000000
3/14/2012	10:39:38 AM	PH3 MFC set to  0.000000
3/14/2012	10:39:38 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:39:38 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:39:39 AM	Tube furnace set to 150
3/14/2012	10:40:09 AM	H2 valve closed
3/14/2012	10:40:09 AM	BCl3 valve closed
3/14/2012	10:40:09 AM	PH3 valve closed
3/14/2012	10:40:09 AM	SiCl4 pre valve closed
3/14/2012	10:40:09 AM	SiCl4 post valve closed
3/14/2012	10:40:09 AM	Bypass valve closed
3/14/2012	10:40:09 AM	Bubbler valve closed
3/14/2012	10:40:09 AM	Helium valve opened
3/14/2012	10:40:09 AM	Main Vac valve opened
3/14/2012	10:40:09 AM	Helium MFC set to  20.000000
3/14/2012	10:40:09 AM	H2 MFC set to  0.000000
3/14/2012	10:40:09 AM	BCl3 MFC set to  0.000000
3/14/2012	10:40:09 AM	PH3 MFC set to  0.000000
3/14/2012	10:40:09 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:40:09 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:40:09 AM	Tube furnace set to 150
3/14/2012	10:40:39 AM	Helium valve closed
3/14/2012	10:40:39 AM	H2 valve closed
3/14/2012	10:40:39 AM	BCl3 valve closed
3/14/2012	10:40:39 AM	PH3 valve closed
3/14/2012	10:40:39 AM	SiCl4 pre valve closed
3/14/2012	10:40:39 AM	SiCl4 post valve closed
3/14/2012	10:40:39 AM	Bypass valve closed
3/14/2012	10:40:39 AM	Bubbler valve closed
3/14/2012	10:40:39 AM	Main Vac valve opened
3/14/2012	10:40:39 AM	Helium MFC set to  0.000000
3/14/2012	10:40:39 AM	H2 MFC set to  0.000000
3/14/2012	10:40:39 AM	BCl3 MFC set to  0.000000
3/14/2012	10:40:39 AM	PH3 MFC set to  0.000000
3/14/2012	10:40:39 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:40:39 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:40:39 AM	Tube furnace set to 150
3/14/2012	10:41:09 AM	H2 valve closed
3/14/2012	10:41:09 AM	BCl3 valve closed
3/14/2012	10:41:09 AM	PH3 valve closed
3/14/2012	10:41:09 AM	SiCl4 pre valve closed
3/14/2012	10:41:09 AM	SiCl4 post valve closed
3/14/2012	10:41:09 AM	Bypass valve closed
3/14/2012	10:41:09 AM	Bubbler valve closed
3/14/2012	10:41:09 AM	Helium valve opened
3/14/2012	10:41:09 AM	Main Vac valve opened
3/14/2012	10:41:09 AM	Helium MFC set to  20.000000
3/14/2012	10:41:09 AM	H2 MFC set to  0.000000
3/14/2012	10:41:09 AM	BCl3 MFC set to  0.000000
3/14/2012	10:41:09 AM	PH3 MFC set to  0.000000
3/14/2012	10:41:09 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:41:09 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:41:09 AM	Tube furnace set to 150
3/14/2012	10:41:39 AM	Helium valve closed
3/14/2012	10:41:39 AM	H2 valve closed
3/14/2012	10:41:39 AM	BCl3 valve closed
3/14/2012	10:41:39 AM	PH3 valve closed
3/14/2012	10:41:39 AM	SiCl4 pre valve closed
3/14/2012	10:41:39 AM	SiCl4 post valve closed
3/14/2012	10:41:39 AM	Bypass valve closed
3/14/2012	10:41:39 AM	Bubbler valve closed
3/14/2012	10:41:39 AM	Main Vac valve opened
3/14/2012	10:41:39 AM	Helium MFC set to  0.000000
3/14/2012	10:41:39 AM	H2 MFC set to  0.000000
3/14/2012	10:41:39 AM	BCl3 MFC set to  0.000000
3/14/2012	10:41:39 AM	PH3 MFC set to  0.000000
3/14/2012	10:41:39 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:41:39 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:41:39 AM	Tube furnace set to 150
3/14/2012	10:42:09 AM	H2 valve closed
3/14/2012	10:42:09 AM	BCl3 valve closed
3/14/2012	10:42:09 AM	PH3 valve closed
3/14/2012	10:42:09 AM	SiCl4 pre valve closed
3/14/2012	10:42:09 AM	SiCl4 post valve closed
3/14/2012	10:42:09 AM	Bypass valve closed
3/14/2012	10:42:09 AM	Bubbler valve closed
3/14/2012	10:42:09 AM	Helium valve opened
3/14/2012	10:42:09 AM	Main Vac valve opened
3/14/2012	10:42:09 AM	Helium MFC set to  20.000000
3/14/2012	10:42:09 AM	H2 MFC set to  0.000000
3/14/2012	10:42:09 AM	BCl3 MFC set to  0.000000
3/14/2012	10:42:09 AM	PH3 MFC set to  0.000000
3/14/2012	10:42:09 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:42:09 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:42:10 AM	Tube furnace set to 150
3/14/2012	10:42:40 AM	Helium valve closed
3/14/2012	10:42:40 AM	H2 valve closed
3/14/2012	10:42:40 AM	BCl3 valve closed
3/14/2012	10:42:40 AM	PH3 valve closed
3/14/2012	10:42:40 AM	SiCl4 pre valve closed
3/14/2012	10:42:40 AM	SiCl4 post valve closed
3/14/2012	10:42:40 AM	Bypass valve closed
3/14/2012	10:42:40 AM	Bubbler valve closed
3/14/2012	10:42:40 AM	Main Vac valve opened
3/14/2012	10:42:40 AM	Helium MFC set to  0.000000
3/14/2012	10:42:40 AM	H2 MFC set to  0.000000
3/14/2012	10:42:40 AM	BCl3 MFC set to  0.000000
3/14/2012	10:42:40 AM	PH3 MFC set to  0.000000
3/14/2012	10:42:40 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:42:40 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:42:40 AM	Tube furnace set to 150
3/14/2012	10:43:10 AM	H2 valve closed
3/14/2012	10:43:10 AM	BCl3 valve closed
3/14/2012	10:43:10 AM	PH3 valve closed
3/14/2012	10:43:10 AM	SiCl4 pre valve closed
3/14/2012	10:43:10 AM	SiCl4 post valve closed
3/14/2012	10:43:10 AM	Bypass valve closed
3/14/2012	10:43:10 AM	Bubbler valve closed
3/14/2012	10:43:10 AM	Helium valve opened
3/14/2012	10:43:10 AM	Main Vac valve opened
3/14/2012	10:43:10 AM	Helium MFC set to  20.000000
3/14/2012	10:43:10 AM	H2 MFC set to  0.000000
3/14/2012	10:43:10 AM	BCl3 MFC set to  0.000000
3/14/2012	10:43:10 AM	PH3 MFC set to  0.000000
3/14/2012	10:43:10 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:43:10 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:43:10 AM	Tube furnace set to 150
3/14/2012	10:43:40 AM	Helium valve closed
3/14/2012	10:43:40 AM	H2 valve closed
3/14/2012	10:43:40 AM	BCl3 valve closed
3/14/2012	10:43:40 AM	PH3 valve closed
3/14/2012	10:43:40 AM	SiCl4 pre valve closed
3/14/2012	10:43:40 AM	SiCl4 post valve closed
3/14/2012	10:43:40 AM	Bypass valve closed
3/14/2012	10:43:40 AM	Bubbler valve closed
3/14/2012	10:43:40 AM	Main Vac valve opened
3/14/2012	10:43:40 AM	Helium MFC set to  0.000000
3/14/2012	10:43:40 AM	H2 MFC set to  0.000000
3/14/2012	10:43:40 AM	BCl3 MFC set to  0.000000
3/14/2012	10:43:40 AM	PH3 MFC set to  0.000000
3/14/2012	10:43:40 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:43:40 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:43:40 AM	Tube furnace set to 150
3/14/2012	10:44:10 AM	H2 valve closed
3/14/2012	10:44:10 AM	BCl3 valve closed
3/14/2012	10:44:10 AM	PH3 valve closed
3/14/2012	10:44:10 AM	SiCl4 pre valve closed
3/14/2012	10:44:10 AM	SiCl4 post valve closed
3/14/2012	10:44:10 AM	Bypass valve closed
3/14/2012	10:44:10 AM	Bubbler valve closed
3/14/2012	10:44:10 AM	Helium valve opened
3/14/2012	10:44:10 AM	Main Vac valve opened
3/14/2012	10:44:10 AM	Helium MFC set to  20.000000
3/14/2012	10:44:10 AM	H2 MFC set to  0.000000
3/14/2012	10:44:10 AM	BCl3 MFC set to  0.000000
3/14/2012	10:44:10 AM	PH3 MFC set to  0.000000
3/14/2012	10:44:10 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:44:10 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:44:11 AM	Tube furnace set to 150
3/14/2012	10:44:41 AM	Helium valve closed
3/14/2012	10:44:41 AM	H2 valve closed
3/14/2012	10:44:41 AM	BCl3 valve closed
3/14/2012	10:44:41 AM	PH3 valve closed
3/14/2012	10:44:41 AM	SiCl4 pre valve closed
3/14/2012	10:44:41 AM	SiCl4 post valve closed
3/14/2012	10:44:41 AM	Bypass valve closed
3/14/2012	10:44:41 AM	Bubbler valve closed
3/14/2012	10:44:41 AM	Main Vac valve opened
3/14/2012	10:44:41 AM	Helium MFC set to  0.000000
3/14/2012	10:44:41 AM	H2 MFC set to  0.000000
3/14/2012	10:44:41 AM	BCl3 MFC set to  0.000000
3/14/2012	10:44:41 AM	PH3 MFC set to  0.000000
3/14/2012	10:44:41 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:44:41 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:44:41 AM	Tube furnace set to 150
3/14/2012	10:45:11 AM	H2 valve closed
3/14/2012	10:45:11 AM	BCl3 valve closed
3/14/2012	10:45:11 AM	PH3 valve closed
3/14/2012	10:45:11 AM	SiCl4 pre valve closed
3/14/2012	10:45:11 AM	SiCl4 post valve closed
3/14/2012	10:45:11 AM	Bypass valve closed
3/14/2012	10:45:11 AM	Bubbler valve closed
3/14/2012	10:45:11 AM	Helium valve opened
3/14/2012	10:45:11 AM	Main Vac valve opened
3/14/2012	10:45:11 AM	Helium MFC set to  20.000000
3/14/2012	10:45:11 AM	H2 MFC set to  0.000000
3/14/2012	10:45:11 AM	BCl3 MFC set to  0.000000
3/14/2012	10:45:11 AM	PH3 MFC set to  0.000000
3/14/2012	10:45:11 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:45:11 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:45:11 AM	Tube furnace set to 150
3/14/2012	10:45:41 AM	Helium valve closed
3/14/2012	10:45:41 AM	H2 valve closed
3/14/2012	10:45:41 AM	BCl3 valve closed
3/14/2012	10:45:41 AM	PH3 valve closed
3/14/2012	10:45:41 AM	SiCl4 pre valve closed
3/14/2012	10:45:41 AM	SiCl4 post valve closed
3/14/2012	10:45:41 AM	Bypass valve closed
3/14/2012	10:45:41 AM	Bubbler valve closed
3/14/2012	10:45:41 AM	Main Vac valve opened
3/14/2012	10:45:41 AM	Helium MFC set to  0.000000
3/14/2012	10:45:41 AM	H2 MFC set to  0.000000
3/14/2012	10:45:41 AM	BCl3 MFC set to  0.000000
3/14/2012	10:45:41 AM	PH3 MFC set to  0.000000
3/14/2012	10:45:41 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:45:41 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:45:41 AM	Tube furnace set to 150
3/14/2012	10:46:11 AM	H2 valve closed
3/14/2012	10:46:11 AM	BCl3 valve closed
3/14/2012	10:46:11 AM	PH3 valve closed
3/14/2012	10:46:11 AM	SiCl4 pre valve closed
3/14/2012	10:46:11 AM	SiCl4 post valve closed
3/14/2012	10:46:11 AM	Bypass valve closed
3/14/2012	10:46:11 AM	Bubbler valve closed
3/14/2012	10:46:11 AM	Helium valve opened
3/14/2012	10:46:11 AM	Main Vac valve opened
3/14/2012	10:46:11 AM	Helium MFC set to  20.000000
3/14/2012	10:46:11 AM	H2 MFC set to  0.000000
3/14/2012	10:46:11 AM	BCl3 MFC set to  0.000000
3/14/2012	10:46:11 AM	PH3 MFC set to  0.000000
3/14/2012	10:46:11 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:46:11 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:46:11 AM	Tube furnace set to 150
3/14/2012	10:46:41 AM	Helium valve closed
3/14/2012	10:46:41 AM	H2 valve closed
3/14/2012	10:46:41 AM	BCl3 valve closed
3/14/2012	10:46:41 AM	PH3 valve closed
3/14/2012	10:46:41 AM	SiCl4 pre valve closed
3/14/2012	10:46:41 AM	SiCl4 post valve closed
3/14/2012	10:46:41 AM	Bypass valve closed
3/14/2012	10:46:41 AM	Bubbler valve closed
3/14/2012	10:46:41 AM	Main Vac valve opened
3/14/2012	10:46:41 AM	Helium MFC set to  0.000000
3/14/2012	10:46:41 AM	H2 MFC set to  0.000000
3/14/2012	10:46:41 AM	BCl3 MFC set to  0.000000
3/14/2012	10:46:41 AM	PH3 MFC set to  0.000000
3/14/2012	10:46:41 AM	SiCl4 MFC set to  0.000000
3/14/2012	10:46:41 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	10:46:42 AM	Tube furnace set to 150
3/14/2012	10:46:43 AM	Run finished at 10:46 AM
3/14/2012	11:15:18 AM	Main Vac valve closed
3/14/2012	11:15:56 AM	Main Vac valve opened
3/14/2012	11:16:57 AM	Recipe started at 11:16 AM
3/14/2012	11:16:57 AM	Helium valve closed
3/14/2012	11:16:57 AM	H2 valve closed
3/14/2012	11:16:57 AM	BCl3 valve closed
3/14/2012	11:16:57 AM	PH3 valve closed
3/14/2012	11:16:57 AM	SiCl4 pre valve closed
3/14/2012	11:16:57 AM	SiCl4 post valve closed
3/14/2012	11:16:57 AM	Main Vac valve closed
3/14/2012	11:16:57 AM	Bypass valve closed
3/14/2012	11:16:57 AM	Bubbler valve closed
3/14/2012	11:16:57 AM	Helium MFC set to  0.000000
3/14/2012	11:16:57 AM	H2 MFC set to  0.000000
3/14/2012	11:16:57 AM	BCl3 MFC set to  0.000000
3/14/2012	11:16:57 AM	PH3 MFC set to  0.000000
3/14/2012	11:16:57 AM	SiCl4 MFC set to  0.000000
3/14/2012	11:16:57 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	11:16:57 AM	Tube furnace set to 0
3/14/2012	11:17:00 AM	Helium valve closed
3/14/2012	11:17:00 AM	BCl3 valve closed
3/14/2012	11:17:00 AM	PH3 valve closed
3/14/2012	11:17:00 AM	SiCl4 pre valve closed
3/14/2012	11:17:00 AM	SiCl4 post valve closed
3/14/2012	11:17:00 AM	Main Vac valve closed
3/14/2012	11:17:00 AM	Bypass valve closed
3/14/2012	11:17:00 AM	Bubbler valve closed
3/14/2012	11:17:00 AM	H2 valve opened
3/14/2012	11:17:00 AM	Helium MFC set to  0.000000
3/14/2012	11:17:00 AM	H2 MFC set to  500.000000
3/14/2012	11:17:00 AM	BCl3 MFC set to  0.000000
3/14/2012	11:17:00 AM	PH3 MFC set to  0.000000
3/14/2012	11:17:00 AM	SiCl4 MFC set to  0.000000
3/14/2012	11:17:00 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	11:17:01 AM	Tube furnace set to 0
3/14/2012	11:18:04 AM	Helium valve closed
3/14/2012	11:18:04 AM	BCl3 valve closed
3/14/2012	11:18:04 AM	PH3 valve closed
3/14/2012	11:18:04 AM	SiCl4 pre valve closed
3/14/2012	11:18:04 AM	SiCl4 post valve closed
3/14/2012	11:18:04 AM	Main Vac valve closed
3/14/2012	11:18:04 AM	Bypass valve closed
3/14/2012	11:18:04 AM	H2 valve opened
3/14/2012	11:18:04 AM	Bubbler valve opened
3/14/2012	11:18:04 AM	Helium MFC set to  0.000000
3/14/2012	11:18:04 AM	H2 MFC set to  500.000000
3/14/2012	11:18:04 AM	BCl3 MFC set to  0.000000
3/14/2012	11:18:04 AM	PH3 MFC set to  0.000000
3/14/2012	11:18:04 AM	SiCl4 MFC set to  0.000000
3/14/2012	11:18:04 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	11:18:05 AM	Tube furnace set to 0
3/14/2012	11:18:06 AM	Helium valve closed
3/14/2012	11:18:06 AM	BCl3 valve closed
3/14/2012	11:18:06 AM	PH3 valve closed
3/14/2012	11:18:06 AM	SiCl4 pre valve closed
3/14/2012	11:18:06 AM	SiCl4 post valve closed
3/14/2012	11:18:06 AM	Main Vac valve closed
3/14/2012	11:18:06 AM	Bypass valve closed
3/14/2012	11:18:06 AM	H2 valve opened
3/14/2012	11:18:06 AM	Bubbler valve opened
3/14/2012	11:18:06 AM	Helium MFC set to  0.000000
3/14/2012	11:18:06 AM	H2 MFC set to  500.000000
3/14/2012	11:18:06 AM	BCl3 MFC set to  0.000000
3/14/2012	11:18:06 AM	PH3 MFC set to  0.000000
3/14/2012	11:18:06 AM	SiCl4 MFC set to  0.000000
3/14/2012	11:18:06 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	11:18:06 AM	Tube furnace set to 950
3/14/2012	11:33:06 AM	Helium valve closed
3/14/2012	11:33:06 AM	PH3 valve closed
3/14/2012	11:33:06 AM	SiCl4 pre valve closed
3/14/2012	11:33:06 AM	SiCl4 post valve closed
3/14/2012	11:33:06 AM	Main Vac valve closed
3/14/2012	11:33:06 AM	Bypass valve closed
3/14/2012	11:33:06 AM	H2 valve opened
3/14/2012	11:33:06 AM	BCl3 valve opened
3/14/2012	11:33:06 AM	Bubbler valve opened
3/14/2012	11:33:06 AM	Helium MFC set to  0.000000
3/14/2012	11:33:06 AM	H2 MFC set to  400.000000
3/14/2012	11:33:06 AM	BCl3 MFC set to  20.000000
3/14/2012	11:33:06 AM	PH3 MFC set to  0.000000
3/14/2012	11:33:06 AM	SiCl4 MFC set to  0.000000
3/14/2012	11:33:06 AM	Bypass solenoid MFC set to  0.000000
3/14/2012	11:33:06 AM	Tube furnace set to 950
3/14/2012	12:03:06 PM	Helium valve closed
3/14/2012	12:03:06 PM	BCl3 valve closed
3/14/2012	12:03:06 PM	PH3 valve closed
3/14/2012	12:03:06 PM	SiCl4 pre valve closed
3/14/2012	12:03:06 PM	SiCl4 post valve closed
3/14/2012	12:03:06 PM	Main Vac valve closed
3/14/2012	12:03:06 PM	Bypass valve closed
3/14/2012	12:03:06 PM	H2 valve opened
3/14/2012	12:03:06 PM	Bubbler valve opened
3/14/2012	12:03:06 PM	Helium MFC set to  0.000000
3/14/2012	12:03:06 PM	H2 MFC set to  500.000000
3/14/2012	12:03:06 PM	BCl3 MFC set to  0.000000
3/14/2012	12:03:06 PM	PH3 MFC set to  0.000000
3/14/2012	12:03:06 PM	SiCl4 MFC set to  0.000000
3/14/2012	12:03:06 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	12:03:06 PM	Tube furnace set to 750
3/14/2012	12:08:06 PM	H2 valve closed
3/14/2012	12:08:06 PM	BCl3 valve closed
3/14/2012	12:08:06 PM	PH3 valve closed
3/14/2012	12:08:06 PM	SiCl4 pre valve closed
3/14/2012	12:08:06 PM	SiCl4 post valve closed
3/14/2012	12:08:06 PM	Main Vac valve closed
3/14/2012	12:08:06 PM	Bypass valve closed
3/14/2012	12:08:06 PM	Helium valve opened
3/14/2012	12:08:06 PM	Bubbler valve opened
3/14/2012	12:08:06 PM	Helium MFC set to  500.000000
3/14/2012	12:08:06 PM	H2 MFC set to  0.000000
3/14/2012	12:08:06 PM	BCl3 MFC set to  0.000000
3/14/2012	12:08:06 PM	PH3 MFC set to  0.000000
3/14/2012	12:08:06 PM	SiCl4 MFC set to  0.000000
3/14/2012	12:08:06 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	12:08:06 PM	Tube furnace set to 0
3/14/2012	12:28:06 PM	Helium valve closed
3/14/2012	12:28:06 PM	H2 valve closed
3/14/2012	12:28:06 PM	BCl3 valve closed
3/14/2012	12:28:06 PM	PH3 valve closed
3/14/2012	12:28:06 PM	SiCl4 pre valve closed
3/14/2012	12:28:06 PM	SiCl4 post valve closed
3/14/2012	12:28:06 PM	Main Vac valve closed
3/14/2012	12:28:06 PM	Bypass valve closed
3/14/2012	12:28:06 PM	Bubbler valve closed
3/14/2012	12:28:06 PM	Helium MFC set to  0.000000
3/14/2012	12:28:06 PM	H2 MFC set to  0.000000
3/14/2012	12:28:06 PM	BCl3 MFC set to  0.000000
3/14/2012	12:28:06 PM	PH3 MFC set to  0.000000
3/14/2012	12:28:06 PM	SiCl4 MFC set to  0.000000
3/14/2012	12:28:06 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	12:28:06 PM	Tube furnace set to 0
3/14/2012	12:28:07 PM	Run finished at 12:28 PM
3/14/2012	12:35:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2012	12:35:24 PM	Recipe started at 12:35 PM
3/14/2012	12:35:24 PM	Helium valve closed
3/14/2012	12:35:24 PM	H2 valve closed
3/14/2012	12:35:24 PM	BCl3 valve closed
3/14/2012	12:35:24 PM	PH3 valve closed
3/14/2012	12:35:24 PM	SiCl4 pre valve closed
3/14/2012	12:35:24 PM	SiCl4 post valve closed
3/14/2012	12:35:24 PM	Main Vac valve closed
3/14/2012	12:35:24 PM	Bypass valve closed
3/14/2012	12:35:24 PM	Bubbler valve closed
3/14/2012	12:35:24 PM	Helium MFC set to  0.000000
3/14/2012	12:35:24 PM	H2 MFC set to  0.000000
3/14/2012	12:35:24 PM	BCl3 MFC set to  0.000000
3/14/2012	12:35:24 PM	PH3 MFC set to  0.000000
3/14/2012	12:35:24 PM	SiCl4 MFC set to  0.000000
3/14/2012	12:35:24 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	12:35:24 PM	Tube furnace set to 0
3/14/2012	12:35:27 PM	H2 valve closed
3/14/2012	12:35:27 PM	BCl3 valve closed
3/14/2012	12:35:27 PM	PH3 valve closed
3/14/2012	12:35:27 PM	SiCl4 pre valve closed
3/14/2012	12:35:27 PM	SiCl4 post valve closed
3/14/2012	12:35:27 PM	Main Vac valve closed
3/14/2012	12:35:27 PM	Bypass valve closed
3/14/2012	12:35:27 PM	Bubbler valve closed
3/14/2012	12:35:27 PM	Helium valve opened
3/14/2012	12:35:27 PM	Helium MFC set to  500.000000
3/14/2012	12:35:27 PM	H2 MFC set to  0.000000
3/14/2012	12:35:27 PM	BCl3 MFC set to  0.000000
3/14/2012	12:35:27 PM	PH3 MFC set to  0.000000
3/14/2012	12:35:27 PM	SiCl4 MFC set to  0.000000
3/14/2012	12:35:27 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	12:35:28 PM	Tube furnace set to 0
3/14/2012	12:35:30 PM	Helium valve closed
3/14/2012	12:35:30 PM	H2 valve closed
3/14/2012	12:35:30 PM	BCl3 valve closed
3/14/2012	12:35:30 PM	PH3 valve closed
3/14/2012	12:35:30 PM	SiCl4 pre valve closed
3/14/2012	12:35:30 PM	SiCl4 post valve closed
3/14/2012	12:35:30 PM	Main Vac valve closed
3/14/2012	12:35:30 PM	Bypass valve closed
3/14/2012	12:35:30 PM	Bubbler valve closed
3/14/2012	12:35:30 PM	Helium MFC set to  0.000000
3/14/2012	12:35:30 PM	H2 MFC set to  0.000000
3/14/2012	12:35:30 PM	BCl3 MFC set to  0.000000
3/14/2012	12:35:30 PM	PH3 MFC set to  0.000000
3/14/2012	12:35:30 PM	SiCl4 MFC set to  0.000000
3/14/2012	12:35:30 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	12:35:30 PM	Tube furnace set to 0
3/14/2012	12:35:31 PM	Run finished at 12:35 PM
3/14/2012	12:35:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2012	12:37:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2012	12:37:28 PM	Recipe started at 12:37 PM
3/14/2012	12:37:28 PM	Helium valve closed
3/14/2012	12:37:28 PM	H2 valve closed
3/14/2012	12:37:28 PM	BCl3 valve closed
3/14/2012	12:37:28 PM	PH3 valve closed
3/14/2012	12:37:28 PM	SiCl4 pre valve closed
3/14/2012	12:37:28 PM	SiCl4 post valve closed
3/14/2012	12:37:28 PM	Main Vac valve closed
3/14/2012	12:37:28 PM	Bubbler valve closed
3/14/2012	12:37:28 PM	Bypass valve opened
3/14/2012	12:37:28 PM	Helium MFC set to  0.000000
3/14/2012	12:37:28 PM	H2 MFC set to  0.000000
3/14/2012	12:37:28 PM	BCl3 MFC set to  0.000000
3/14/2012	12:37:28 PM	PH3 MFC set to  0.000000
3/14/2012	12:37:28 PM	SiCl4 MFC set to  0.000000
3/14/2012	12:37:28 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	12:37:28 PM	Tube furnace set to 0
3/14/2012	12:38:27 PM	Helium valve closed
3/14/2012	12:38:27 PM	H2 valve closed
3/14/2012	12:38:27 PM	BCl3 valve closed
3/14/2012	12:38:27 PM	PH3 valve closed
3/14/2012	12:38:27 PM	SiCl4 pre valve closed
3/14/2012	12:38:27 PM	SiCl4 post valve closed
3/14/2012	12:38:27 PM	Main Vac valve closed
3/14/2012	12:38:27 PM	Bubbler valve closed
3/14/2012	12:38:27 PM	Bypass valve opened
3/14/2012	12:38:27 PM	Helium MFC set to  0.000000
3/14/2012	12:38:27 PM	H2 MFC set to  0.000000
3/14/2012	12:38:27 PM	BCl3 MFC set to  0.000000
3/14/2012	12:38:27 PM	PH3 MFC set to  0.000000
3/14/2012	12:38:27 PM	SiCl4 MFC set to  0.000000
3/14/2012	12:38:27 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	12:38:27 PM	Tube furnace set to 0
3/14/2012	12:39:03 PM	Helium valve closed
3/14/2012	12:39:03 PM	H2 valve closed
3/14/2012	12:39:03 PM	BCl3 valve closed
3/14/2012	12:39:04 PM	PH3 valve closed
3/14/2012	12:39:04 PM	SiCl4 pre valve closed
3/14/2012	12:39:04 PM	SiCl4 post valve closed
3/14/2012	12:39:04 PM	Bypass valve closed
3/14/2012	12:39:04 PM	Bubbler valve closed
3/14/2012	12:39:04 PM	Main Vac valve opened
3/14/2012	12:39:04 PM	Helium MFC set to  0.000000
3/14/2012	12:39:04 PM	H2 MFC set to  0.000000
3/14/2012	12:39:04 PM	BCl3 MFC set to  0.000000
3/14/2012	12:39:04 PM	PH3 MFC set to  0.000000
3/14/2012	12:39:04 PM	SiCl4 MFC set to  0.000000
3/14/2012	12:39:04 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	12:39:04 PM	Tube furnace set to 0
3/14/2012	12:39:05 PM	Run finished at 12:39 PM
3/14/2012	12:39:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2012	12:55:39 PM	Main Vac valve closed
3/14/2012	12:55:53 PM	Main Vac valve opened
3/14/2012	12:56:21 PM	Recipe started at 12:56 PM
3/14/2012	12:56:21 PM	Helium valve closed
3/14/2012	12:56:21 PM	H2 valve closed
3/14/2012	12:56:21 PM	BCl3 valve closed
3/14/2012	12:56:21 PM	PH3 valve closed
3/14/2012	12:56:21 PM	SiCl4 pre valve closed
3/14/2012	12:56:21 PM	SiCl4 post valve closed
3/14/2012	12:56:21 PM	Main Vac valve closed
3/14/2012	12:56:21 PM	Bypass valve closed
3/14/2012	12:56:21 PM	Bubbler valve closed
3/14/2012	12:56:21 PM	Helium MFC set to  0.000000
3/14/2012	12:56:21 PM	H2 MFC set to  0.000000
3/14/2012	12:56:21 PM	BCl3 MFC set to  0.000000
3/14/2012	12:56:21 PM	PH3 MFC set to  0.000000
3/14/2012	12:56:21 PM	SiCl4 MFC set to  0.000000
3/14/2012	12:56:21 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	12:56:21 PM	Tube furnace set to 0
3/14/2012	12:56:24 PM	Helium valve closed
3/14/2012	12:56:24 PM	BCl3 valve closed
3/14/2012	12:56:24 PM	PH3 valve closed
3/14/2012	12:56:24 PM	SiCl4 pre valve closed
3/14/2012	12:56:24 PM	SiCl4 post valve closed
3/14/2012	12:56:24 PM	Main Vac valve closed
3/14/2012	12:56:24 PM	Bypass valve closed
3/14/2012	12:56:24 PM	Bubbler valve closed
3/14/2012	12:56:24 PM	H2 valve opened
3/14/2012	12:56:24 PM	Helium MFC set to  0.000000
3/14/2012	12:56:24 PM	H2 MFC set to  500.000000
3/14/2012	12:56:24 PM	BCl3 MFC set to  0.000000
3/14/2012	12:56:24 PM	PH3 MFC set to  0.000000
3/14/2012	12:56:24 PM	SiCl4 MFC set to  0.000000
3/14/2012	12:56:24 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	12:56:24 PM	Tube furnace set to 0
3/14/2012	12:57:28 PM	Helium valve closed
3/14/2012	12:57:28 PM	BCl3 valve closed
3/14/2012	12:57:28 PM	PH3 valve closed
3/14/2012	12:57:28 PM	SiCl4 pre valve closed
3/14/2012	12:57:28 PM	SiCl4 post valve closed
3/14/2012	12:57:28 PM	Main Vac valve closed
3/14/2012	12:57:28 PM	Bypass valve closed
3/14/2012	12:57:28 PM	H2 valve opened
3/14/2012	12:57:28 PM	Bubbler valve opened
3/14/2012	12:57:28 PM	Helium MFC set to  0.000000
3/14/2012	12:57:28 PM	H2 MFC set to  500.000000
3/14/2012	12:57:28 PM	BCl3 MFC set to  0.000000
3/14/2012	12:57:28 PM	PH3 MFC set to  0.000000
3/14/2012	12:57:28 PM	SiCl4 MFC set to  0.000000
3/14/2012	12:57:28 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	12:57:28 PM	Tube furnace set to 0
3/14/2012	12:57:29 PM	Helium valve closed
3/14/2012	12:57:29 PM	BCl3 valve closed
3/14/2012	12:57:29 PM	PH3 valve closed
3/14/2012	12:57:29 PM	SiCl4 pre valve closed
3/14/2012	12:57:29 PM	SiCl4 post valve closed
3/14/2012	12:57:30 PM	Main Vac valve closed
3/14/2012	12:57:30 PM	Bypass valve closed
3/14/2012	12:57:30 PM	H2 valve opened
3/14/2012	12:57:30 PM	Bubbler valve opened
3/14/2012	12:57:30 PM	Helium MFC set to  0.000000
3/14/2012	12:57:30 PM	H2 MFC set to  500.000000
3/14/2012	12:57:30 PM	BCl3 MFC set to  0.000000
3/14/2012	12:57:30 PM	PH3 MFC set to  0.000000
3/14/2012	12:57:30 PM	SiCl4 MFC set to  0.000000
3/14/2012	12:57:30 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	12:57:30 PM	Tube furnace set to 950
3/14/2012	1:12:30 PM	Helium valve closed
3/14/2012	1:12:30 PM	PH3 valve closed
3/14/2012	1:12:30 PM	SiCl4 pre valve closed
3/14/2012	1:12:30 PM	SiCl4 post valve closed
3/14/2012	1:12:30 PM	Main Vac valve closed
3/14/2012	1:12:30 PM	Bypass valve closed
3/14/2012	1:12:30 PM	H2 valve opened
3/14/2012	1:12:30 PM	BCl3 valve opened
3/14/2012	1:12:30 PM	Bubbler valve opened
3/14/2012	1:12:30 PM	Helium MFC set to  0.000000
3/14/2012	1:12:30 PM	H2 MFC set to  400.000000
3/14/2012	1:12:30 PM	BCl3 MFC set to  20.000000
3/14/2012	1:12:30 PM	PH3 MFC set to  0.000000
3/14/2012	1:12:30 PM	SiCl4 MFC set to  0.000000
3/14/2012	1:12:30 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	1:12:30 PM	Tube furnace set to 950
3/14/2012	1:42:30 PM	Helium valve closed
3/14/2012	1:42:30 PM	BCl3 valve closed
3/14/2012	1:42:30 PM	PH3 valve closed
3/14/2012	1:42:30 PM	SiCl4 pre valve closed
3/14/2012	1:42:30 PM	SiCl4 post valve closed
3/14/2012	1:42:30 PM	Main Vac valve closed
3/14/2012	1:42:30 PM	Bypass valve closed
3/14/2012	1:42:30 PM	H2 valve opened
3/14/2012	1:42:30 PM	Bubbler valve opened
3/14/2012	1:42:30 PM	Helium MFC set to  0.000000
3/14/2012	1:42:30 PM	H2 MFC set to  500.000000
3/14/2012	1:42:30 PM	BCl3 MFC set to  0.000000
3/14/2012	1:42:30 PM	PH3 MFC set to  0.000000
3/14/2012	1:42:30 PM	SiCl4 MFC set to  0.000000
3/14/2012	1:42:30 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	1:42:30 PM	Tube furnace set to 750
3/14/2012	1:47:30 PM	H2 valve closed
3/14/2012	1:47:30 PM	BCl3 valve closed
3/14/2012	1:47:30 PM	PH3 valve closed
3/14/2012	1:47:30 PM	SiCl4 pre valve closed
3/14/2012	1:47:30 PM	SiCl4 post valve closed
3/14/2012	1:47:30 PM	Main Vac valve closed
3/14/2012	1:47:30 PM	Bypass valve closed
3/14/2012	1:47:30 PM	Helium valve opened
3/14/2012	1:47:30 PM	Bubbler valve opened
3/14/2012	1:47:30 PM	Helium MFC set to  500.000000
3/14/2012	1:47:30 PM	H2 MFC set to  0.000000
3/14/2012	1:47:30 PM	BCl3 MFC set to  0.000000
3/14/2012	1:47:30 PM	PH3 MFC set to  0.000000
3/14/2012	1:47:30 PM	SiCl4 MFC set to  0.000000
3/14/2012	1:47:30 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	1:47:30 PM	Tube furnace set to 0
3/14/2012	2:07:30 PM	Helium valve closed
3/14/2012	2:07:30 PM	H2 valve closed
3/14/2012	2:07:30 PM	BCl3 valve closed
3/14/2012	2:07:30 PM	PH3 valve closed
3/14/2012	2:07:30 PM	SiCl4 pre valve closed
3/14/2012	2:07:30 PM	SiCl4 post valve closed
3/14/2012	2:07:30 PM	Main Vac valve closed
3/14/2012	2:07:30 PM	Bypass valve closed
3/14/2012	2:07:30 PM	Bubbler valve closed
3/14/2012	2:07:30 PM	Helium MFC set to  0.000000
3/14/2012	2:07:30 PM	H2 MFC set to  0.000000
3/14/2012	2:07:30 PM	BCl3 MFC set to  0.000000
3/14/2012	2:07:30 PM	PH3 MFC set to  0.000000
3/14/2012	2:07:30 PM	SiCl4 MFC set to  0.000000
3/14/2012	2:07:30 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	2:07:31 PM	Tube furnace set to 0
3/14/2012	2:07:32 PM	Run finished at 2:07 PM
3/14/2012	2:50:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2012	2:50:52 PM	Recipe started at 2:50 PM
3/14/2012	2:50:52 PM	Helium valve closed
3/14/2012	2:50:52 PM	H2 valve closed
3/14/2012	2:50:52 PM	BCl3 valve closed
3/14/2012	2:50:52 PM	PH3 valve closed
3/14/2012	2:50:52 PM	SiCl4 pre valve closed
3/14/2012	2:50:52 PM	SiCl4 post valve closed
3/14/2012	2:50:52 PM	Main Vac valve closed
3/14/2012	2:50:52 PM	Bypass valve closed
3/14/2012	2:50:52 PM	Bubbler valve closed
3/14/2012	2:50:52 PM	Helium MFC set to  0.000000
3/14/2012	2:50:52 PM	H2 MFC set to  0.000000
3/14/2012	2:50:52 PM	BCl3 MFC set to  0.000000
3/14/2012	2:50:52 PM	PH3 MFC set to  0.000000
3/14/2012	2:50:52 PM	SiCl4 MFC set to  0.000000
3/14/2012	2:50:52 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	2:50:52 PM	Tube furnace set to 0
3/14/2012	2:50:55 PM	H2 valve closed
3/14/2012	2:50:55 PM	BCl3 valve closed
3/14/2012	2:50:55 PM	PH3 valve closed
3/14/2012	2:50:55 PM	SiCl4 pre valve closed
3/14/2012	2:50:55 PM	SiCl4 post valve closed
3/14/2012	2:50:55 PM	Main Vac valve closed
3/14/2012	2:50:55 PM	Bypass valve closed
3/14/2012	2:50:55 PM	Bubbler valve closed
3/14/2012	2:50:55 PM	Helium valve opened
3/14/2012	2:50:55 PM	Helium MFC set to  500.000000
3/14/2012	2:50:55 PM	H2 MFC set to  0.000000
3/14/2012	2:50:55 PM	BCl3 MFC set to  0.000000
3/14/2012	2:50:55 PM	PH3 MFC set to  0.000000
3/14/2012	2:50:55 PM	SiCl4 MFC set to  0.000000
3/14/2012	2:50:55 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	2:50:56 PM	Tube furnace set to 0
3/14/2012	2:51:00 PM	Helium valve closed
3/14/2012	2:51:00 PM	H2 valve closed
3/14/2012	2:51:00 PM	BCl3 valve closed
3/14/2012	2:51:00 PM	PH3 valve closed
3/14/2012	2:51:00 PM	SiCl4 pre valve closed
3/14/2012	2:51:00 PM	SiCl4 post valve closed
3/14/2012	2:51:00 PM	Main Vac valve closed
3/14/2012	2:51:00 PM	Bypass valve closed
3/14/2012	2:51:00 PM	Bubbler valve closed
3/14/2012	2:51:00 PM	Helium MFC set to  0.000000
3/14/2012	2:51:00 PM	H2 MFC set to  0.000000
3/14/2012	2:51:00 PM	BCl3 MFC set to  0.000000
3/14/2012	2:51:00 PM	PH3 MFC set to  0.000000
3/14/2012	2:51:00 PM	SiCl4 MFC set to  0.000000
3/14/2012	2:51:00 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	2:51:01 PM	Tube furnace set to 0
3/14/2012	2:51:02 PM	Run finished at 2:51 PM
3/14/2012	2:51:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2012	2:52:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2012	2:52:51 PM	Recipe started at 2:52 PM
3/14/2012	2:52:51 PM	Helium valve closed
3/14/2012	2:52:51 PM	H2 valve closed
3/14/2012	2:52:51 PM	BCl3 valve closed
3/14/2012	2:52:51 PM	PH3 valve closed
3/14/2012	2:52:51 PM	SiCl4 pre valve closed
3/14/2012	2:52:51 PM	SiCl4 post valve closed
3/14/2012	2:52:51 PM	Main Vac valve closed
3/14/2012	2:52:51 PM	Bubbler valve closed
3/14/2012	2:52:51 PM	Bypass valve opened
3/14/2012	2:52:51 PM	Helium MFC set to  0.000000
3/14/2012	2:52:51 PM	H2 MFC set to  0.000000
3/14/2012	2:52:51 PM	BCl3 MFC set to  0.000000
3/14/2012	2:52:51 PM	PH3 MFC set to  0.000000
3/14/2012	2:52:51 PM	SiCl4 MFC set to  0.000000
3/14/2012	2:52:51 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	2:52:52 PM	Tube furnace set to 0
3/14/2012	2:53:49 PM	Helium valve closed
3/14/2012	2:53:49 PM	H2 valve closed
3/14/2012	2:53:49 PM	BCl3 valve closed
3/14/2012	2:53:49 PM	PH3 valve closed
3/14/2012	2:53:49 PM	SiCl4 pre valve closed
3/14/2012	2:53:49 PM	SiCl4 post valve closed
3/14/2012	2:53:49 PM	Main Vac valve closed
3/14/2012	2:53:49 PM	Bubbler valve closed
3/14/2012	2:53:49 PM	Bypass valve opened
3/14/2012	2:53:49 PM	Helium MFC set to  0.000000
3/14/2012	2:53:49 PM	H2 MFC set to  0.000000
3/14/2012	2:53:49 PM	BCl3 MFC set to  0.000000
3/14/2012	2:53:49 PM	PH3 MFC set to  0.000000
3/14/2012	2:53:49 PM	SiCl4 MFC set to  0.000000
3/14/2012	2:53:49 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	2:53:49 PM	Tube furnace set to 0
3/14/2012	2:54:19 PM	Helium valve closed
3/14/2012	2:54:19 PM	H2 valve closed
3/14/2012	2:54:19 PM	BCl3 valve closed
3/14/2012	2:54:19 PM	PH3 valve closed
3/14/2012	2:54:19 PM	SiCl4 pre valve closed
3/14/2012	2:54:19 PM	SiCl4 post valve closed
3/14/2012	2:54:19 PM	Bypass valve closed
3/14/2012	2:54:19 PM	Bubbler valve closed
3/14/2012	2:54:19 PM	Main Vac valve opened
3/14/2012	2:54:19 PM	Helium MFC set to  0.000000
3/14/2012	2:54:19 PM	H2 MFC set to  0.000000
3/14/2012	2:54:19 PM	BCl3 MFC set to  0.000000
3/14/2012	2:54:19 PM	PH3 MFC set to  0.000000
3/14/2012	2:54:19 PM	SiCl4 MFC set to  0.000000
3/14/2012	2:54:19 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	2:54:19 PM	Tube furnace set to 0
3/14/2012	2:54:20 PM	Run finished at 2:54 PM
3/14/2012	2:54:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2012	3:37:08 PM	Main Vac valve closed
3/14/2012	3:37:25 PM	Main Vac valve opened
3/14/2012	3:38:14 PM	Recipe started at 3:38 PM
3/14/2012	3:38:14 PM	Helium valve closed
3/14/2012	3:38:14 PM	H2 valve closed
3/14/2012	3:38:14 PM	BCl3 valve closed
3/14/2012	3:38:14 PM	PH3 valve closed
3/14/2012	3:38:14 PM	SiCl4 pre valve closed
3/14/2012	3:38:14 PM	SiCl4 post valve closed
3/14/2012	3:38:14 PM	Main Vac valve closed
3/14/2012	3:38:14 PM	Bypass valve closed
3/14/2012	3:38:14 PM	Bubbler valve closed
3/14/2012	3:38:14 PM	Helium MFC set to  0.000000
3/14/2012	3:38:14 PM	H2 MFC set to  0.000000
3/14/2012	3:38:14 PM	BCl3 MFC set to  0.000000
3/14/2012	3:38:14 PM	PH3 MFC set to  0.000000
3/14/2012	3:38:14 PM	SiCl4 MFC set to  0.000000
3/14/2012	3:38:14 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	3:38:14 PM	Tube furnace set to 0
3/14/2012	3:38:17 PM	Helium valve closed
3/14/2012	3:38:17 PM	BCl3 valve closed
3/14/2012	3:38:17 PM	PH3 valve closed
3/14/2012	3:38:17 PM	SiCl4 pre valve closed
3/14/2012	3:38:17 PM	SiCl4 post valve closed
3/14/2012	3:38:17 PM	Main Vac valve closed
3/14/2012	3:38:17 PM	Bypass valve closed
3/14/2012	3:38:17 PM	Bubbler valve closed
3/14/2012	3:38:17 PM	H2 valve opened
3/14/2012	3:38:17 PM	Helium MFC set to  0.000000
3/14/2012	3:38:17 PM	H2 MFC set to  500.000000
3/14/2012	3:38:17 PM	BCl3 MFC set to  0.000000
3/14/2012	3:38:17 PM	PH3 MFC set to  0.000000
3/14/2012	3:38:17 PM	SiCl4 MFC set to  0.000000
3/14/2012	3:38:17 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	3:38:17 PM	Tube furnace set to 0
3/14/2012	3:39:22 PM	Helium valve closed
3/14/2012	3:39:22 PM	BCl3 valve closed
3/14/2012	3:39:22 PM	PH3 valve closed
3/14/2012	3:39:22 PM	SiCl4 pre valve closed
3/14/2012	3:39:22 PM	SiCl4 post valve closed
3/14/2012	3:39:22 PM	Main Vac valve closed
3/14/2012	3:39:22 PM	Bypass valve closed
3/14/2012	3:39:22 PM	H2 valve opened
3/14/2012	3:39:22 PM	Bubbler valve opened
3/14/2012	3:39:22 PM	Helium MFC set to  0.000000
3/14/2012	3:39:22 PM	H2 MFC set to  500.000000
3/14/2012	3:39:22 PM	BCl3 MFC set to  0.000000
3/14/2012	3:39:22 PM	PH3 MFC set to  0.000000
3/14/2012	3:39:22 PM	SiCl4 MFC set to  0.000000
3/14/2012	3:39:22 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	3:39:22 PM	Tube furnace set to 0
3/14/2012	3:39:23 PM	Helium valve closed
3/14/2012	3:39:23 PM	BCl3 valve closed
3/14/2012	3:39:23 PM	PH3 valve closed
3/14/2012	3:39:23 PM	SiCl4 pre valve closed
3/14/2012	3:39:23 PM	SiCl4 post valve closed
3/14/2012	3:39:23 PM	Main Vac valve closed
3/14/2012	3:39:23 PM	Bypass valve closed
3/14/2012	3:39:23 PM	H2 valve opened
3/14/2012	3:39:23 PM	Bubbler valve opened
3/14/2012	3:39:23 PM	Helium MFC set to  0.000000
3/14/2012	3:39:23 PM	H2 MFC set to  500.000000
3/14/2012	3:39:23 PM	BCl3 MFC set to  0.000000
3/14/2012	3:39:23 PM	PH3 MFC set to  0.000000
3/14/2012	3:39:23 PM	SiCl4 MFC set to  0.000000
3/14/2012	3:39:23 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	3:39:23 PM	Tube furnace set to 950
3/14/2012	3:54:23 PM	Helium valve closed
3/14/2012	3:54:23 PM	PH3 valve closed
3/14/2012	3:54:23 PM	SiCl4 pre valve closed
3/14/2012	3:54:23 PM	SiCl4 post valve closed
3/14/2012	3:54:23 PM	Main Vac valve closed
3/14/2012	3:54:23 PM	Bypass valve closed
3/14/2012	3:54:23 PM	H2 valve opened
3/14/2012	3:54:23 PM	BCl3 valve opened
3/14/2012	3:54:23 PM	Bubbler valve opened
3/14/2012	3:54:23 PM	Helium MFC set to  0.000000
3/14/2012	3:54:23 PM	H2 MFC set to  400.000000
3/14/2012	3:54:23 PM	BCl3 MFC set to  20.000000
3/14/2012	3:54:23 PM	PH3 MFC set to  0.000000
3/14/2012	3:54:23 PM	SiCl4 MFC set to  0.000000
3/14/2012	3:54:23 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	3:54:24 PM	Tube furnace set to 950
3/14/2012	4:24:24 PM	Helium valve closed
3/14/2012	4:24:24 PM	BCl3 valve closed
3/14/2012	4:24:24 PM	PH3 valve closed
3/14/2012	4:24:24 PM	SiCl4 pre valve closed
3/14/2012	4:24:24 PM	SiCl4 post valve closed
3/14/2012	4:24:24 PM	Main Vac valve closed
3/14/2012	4:24:24 PM	Bypass valve closed
3/14/2012	4:24:24 PM	H2 valve opened
3/14/2012	4:24:24 PM	Bubbler valve opened
3/14/2012	4:24:24 PM	Helium MFC set to  0.000000
3/14/2012	4:24:24 PM	H2 MFC set to  500.000000
3/14/2012	4:24:24 PM	BCl3 MFC set to  0.000000
3/14/2012	4:24:24 PM	PH3 MFC set to  0.000000
3/14/2012	4:24:24 PM	SiCl4 MFC set to  0.000000
3/14/2012	4:24:24 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	4:24:24 PM	Tube furnace set to 750
3/14/2012	4:29:24 PM	H2 valve closed
3/14/2012	4:29:24 PM	BCl3 valve closed
3/14/2012	4:29:24 PM	PH3 valve closed
3/14/2012	4:29:24 PM	SiCl4 pre valve closed
3/14/2012	4:29:24 PM	SiCl4 post valve closed
3/14/2012	4:29:24 PM	Main Vac valve closed
3/14/2012	4:29:24 PM	Bypass valve closed
3/14/2012	4:29:24 PM	Helium valve opened
3/14/2012	4:29:24 PM	Bubbler valve opened
3/14/2012	4:29:24 PM	Helium MFC set to  500.000000
3/14/2012	4:29:24 PM	H2 MFC set to  0.000000
3/14/2012	4:29:24 PM	BCl3 MFC set to  0.000000
3/14/2012	4:29:24 PM	PH3 MFC set to  0.000000
3/14/2012	4:29:24 PM	SiCl4 MFC set to  0.000000
3/14/2012	4:29:24 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	4:29:24 PM	Tube furnace set to 0
3/14/2012	4:49:24 PM	Helium valve closed
3/14/2012	4:49:24 PM	H2 valve closed
3/14/2012	4:49:24 PM	BCl3 valve closed
3/14/2012	4:49:24 PM	PH3 valve closed
3/14/2012	4:49:24 PM	SiCl4 pre valve closed
3/14/2012	4:49:24 PM	SiCl4 post valve closed
3/14/2012	4:49:24 PM	Main Vac valve closed
3/14/2012	4:49:24 PM	Bypass valve closed
3/14/2012	4:49:24 PM	Bubbler valve closed
3/14/2012	4:49:24 PM	Helium MFC set to  0.000000
3/14/2012	4:49:24 PM	H2 MFC set to  0.000000
3/14/2012	4:49:24 PM	BCl3 MFC set to  0.000000
3/14/2012	4:49:24 PM	PH3 MFC set to  0.000000
3/14/2012	4:49:24 PM	SiCl4 MFC set to  0.000000
3/14/2012	4:49:24 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	4:49:24 PM	Tube furnace set to 0
3/14/2012	4:49:25 PM	Run finished at 4:49 PM
3/14/2012	5:11:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2012	5:11:56 PM	Recipe started at 5:11 PM
3/14/2012	5:11:56 PM	Helium valve closed
3/14/2012	5:11:56 PM	H2 valve closed
3/14/2012	5:11:56 PM	BCl3 valve closed
3/14/2012	5:11:56 PM	PH3 valve closed
3/14/2012	5:11:56 PM	SiCl4 pre valve closed
3/14/2012	5:11:56 PM	SiCl4 post valve closed
3/14/2012	5:11:56 PM	Main Vac valve closed
3/14/2012	5:11:56 PM	Bypass valve closed
3/14/2012	5:11:56 PM	Bubbler valve closed
3/14/2012	5:11:56 PM	Helium MFC set to  0.000000
3/14/2012	5:11:56 PM	H2 MFC set to  0.000000
3/14/2012	5:11:56 PM	BCl3 MFC set to  0.000000
3/14/2012	5:11:56 PM	PH3 MFC set to  0.000000
3/14/2012	5:11:56 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:11:56 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:11:56 PM	Tube furnace set to 0
3/14/2012	5:11:59 PM	H2 valve closed
3/14/2012	5:11:59 PM	BCl3 valve closed
3/14/2012	5:11:59 PM	PH3 valve closed
3/14/2012	5:11:59 PM	SiCl4 pre valve closed
3/14/2012	5:11:59 PM	SiCl4 post valve closed
3/14/2012	5:11:59 PM	Main Vac valve closed
3/14/2012	5:11:59 PM	Bypass valve closed
3/14/2012	5:11:59 PM	Bubbler valve closed
3/14/2012	5:11:59 PM	Helium valve opened
3/14/2012	5:11:59 PM	Helium MFC set to  500.000000
3/14/2012	5:11:59 PM	H2 MFC set to  0.000000
3/14/2012	5:11:59 PM	BCl3 MFC set to  0.000000
3/14/2012	5:11:59 PM	PH3 MFC set to  0.000000
3/14/2012	5:11:59 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:11:59 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:11:59 PM	Tube furnace set to 0
3/14/2012	5:12:06 PM	Helium valve closed
3/14/2012	5:12:06 PM	H2 valve closed
3/14/2012	5:12:06 PM	BCl3 valve closed
3/14/2012	5:12:06 PM	PH3 valve closed
3/14/2012	5:12:06 PM	SiCl4 pre valve closed
3/14/2012	5:12:06 PM	SiCl4 post valve closed
3/14/2012	5:12:06 PM	Main Vac valve closed
3/14/2012	5:12:06 PM	Bypass valve closed
3/14/2012	5:12:06 PM	Bubbler valve closed
3/14/2012	5:12:06 PM	Helium MFC set to  0.000000
3/14/2012	5:12:06 PM	H2 MFC set to  0.000000
3/14/2012	5:12:06 PM	BCl3 MFC set to  0.000000
3/14/2012	5:12:06 PM	PH3 MFC set to  0.000000
3/14/2012	5:12:06 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:12:06 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:12:06 PM	Tube furnace set to 0
3/14/2012	5:12:07 PM	Run finished at 5:12 PM
3/14/2012	5:12:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2012	5:13:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2012	5:13:40 PM	Recipe started at 5:13 PM
3/14/2012	5:13:40 PM	Helium valve closed
3/14/2012	5:13:40 PM	H2 valve closed
3/14/2012	5:13:40 PM	BCl3 valve closed
3/14/2012	5:13:40 PM	PH3 valve closed
3/14/2012	5:13:40 PM	SiCl4 pre valve closed
3/14/2012	5:13:40 PM	SiCl4 post valve closed
3/14/2012	5:13:40 PM	Main Vac valve closed
3/14/2012	5:13:40 PM	Bubbler valve closed
3/14/2012	5:13:40 PM	Bypass valve opened
3/14/2012	5:13:40 PM	Helium MFC set to  0.000000
3/14/2012	5:13:40 PM	H2 MFC set to  0.000000
3/14/2012	5:13:40 PM	BCl3 MFC set to  0.000000
3/14/2012	5:13:40 PM	PH3 MFC set to  0.000000
3/14/2012	5:13:40 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:13:40 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:13:40 PM	Tube furnace set to 0
3/14/2012	5:14:38 PM	Helium valve closed
3/14/2012	5:14:38 PM	H2 valve closed
3/14/2012	5:14:38 PM	BCl3 valve closed
3/14/2012	5:14:38 PM	PH3 valve closed
3/14/2012	5:14:38 PM	SiCl4 pre valve closed
3/14/2012	5:14:38 PM	SiCl4 post valve closed
3/14/2012	5:14:38 PM	Main Vac valve closed
3/14/2012	5:14:38 PM	Bubbler valve closed
3/14/2012	5:14:38 PM	Bypass valve opened
3/14/2012	5:14:38 PM	Helium MFC set to  0.000000
3/14/2012	5:14:38 PM	H2 MFC set to  0.000000
3/14/2012	5:14:38 PM	BCl3 MFC set to  0.000000
3/14/2012	5:14:38 PM	PH3 MFC set to  0.000000
3/14/2012	5:14:38 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:14:38 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:14:38 PM	Tube furnace set to 0
3/14/2012	5:15:38 PM	Helium valve closed
3/14/2012	5:15:38 PM	H2 valve closed
3/14/2012	5:15:38 PM	BCl3 valve closed
3/14/2012	5:15:38 PM	PH3 valve closed
3/14/2012	5:15:38 PM	SiCl4 pre valve closed
3/14/2012	5:15:38 PM	SiCl4 post valve closed
3/14/2012	5:15:38 PM	Bypass valve closed
3/14/2012	5:15:38 PM	Bubbler valve closed
3/14/2012	5:15:38 PM	Main Vac valve opened
3/14/2012	5:15:38 PM	Helium MFC set to  0.000000
3/14/2012	5:15:38 PM	H2 MFC set to  0.000000
3/14/2012	5:15:38 PM	BCl3 MFC set to  0.000000
3/14/2012	5:15:38 PM	PH3 MFC set to  0.000000
3/14/2012	5:15:38 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:15:38 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:15:39 PM	Tube furnace set to 0
3/14/2012	5:15:40 PM	Run finished at 5:15 PM
3/14/2012	5:15:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2012	5:37:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/14/2012	5:38:03 PM	Recipe started at 5:37 PM
3/14/2012	5:38:03 PM	Helium valve closed
3/14/2012	5:38:03 PM	H2 valve closed
3/14/2012	5:38:03 PM	BCl3 valve closed
3/14/2012	5:38:03 PM	PH3 valve closed
3/14/2012	5:38:03 PM	SiCl4 pre valve closed
3/14/2012	5:38:03 PM	SiCl4 post valve closed
3/14/2012	5:38:03 PM	Main Vac valve closed
3/14/2012	5:38:03 PM	Bubbler valve closed
3/14/2012	5:38:03 PM	Bypass valve opened
3/14/2012	5:38:03 PM	Helium MFC set to  0.000000
3/14/2012	5:38:03 PM	H2 MFC set to  0.000000
3/14/2012	5:38:03 PM	BCl3 MFC set to  0.000000
3/14/2012	5:38:03 PM	PH3 MFC set to  0.000000
3/14/2012	5:38:03 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:38:03 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:38:03 PM	Tube furnace set to 0
3/14/2012	5:38:04 PM	Helium valve closed
3/14/2012	5:38:04 PM	H2 valve closed
3/14/2012	5:38:04 PM	BCl3 valve closed
3/14/2012	5:38:04 PM	PH3 valve closed
3/14/2012	5:38:04 PM	SiCl4 pre valve closed
3/14/2012	5:38:04 PM	SiCl4 post valve closed
3/14/2012	5:38:04 PM	Main Vac valve closed
3/14/2012	5:38:04 PM	Bubbler valve closed
3/14/2012	5:38:04 PM	Bypass valve opened
3/14/2012	5:38:04 PM	Helium MFC set to  0.000000
3/14/2012	5:38:04 PM	H2 MFC set to  0.000000
3/14/2012	5:38:04 PM	BCl3 MFC set to  0.000000
3/14/2012	5:38:04 PM	PH3 MFC set to  0.000000
3/14/2012	5:38:04 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:38:04 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:38:04 PM	Tube furnace set to 0
3/14/2012	5:38:04 PM	Helium valve closed
3/14/2012	5:38:04 PM	H2 valve closed
3/14/2012	5:38:04 PM	BCl3 valve closed
3/14/2012	5:38:04 PM	PH3 valve closed
3/14/2012	5:38:04 PM	SiCl4 pre valve closed
3/14/2012	5:38:04 PM	SiCl4 post valve closed
3/14/2012	5:38:04 PM	Bypass valve closed
3/14/2012	5:38:04 PM	Bubbler valve closed
3/14/2012	5:38:04 PM	Main Vac valve opened
3/14/2012	5:38:04 PM	Helium MFC set to  0.000000
3/14/2012	5:38:04 PM	H2 MFC set to  0.000000
3/14/2012	5:38:04 PM	BCl3 MFC set to  0.000000
3/14/2012	5:38:04 PM	PH3 MFC set to  0.000000
3/14/2012	5:38:04 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:38:04 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:38:04 PM	Tube furnace set to 0
3/14/2012	5:38:34 PM	H2 valve closed
3/14/2012	5:38:34 PM	BCl3 valve closed
3/14/2012	5:38:34 PM	PH3 valve closed
3/14/2012	5:38:34 PM	SiCl4 pre valve closed
3/14/2012	5:38:34 PM	SiCl4 post valve closed
3/14/2012	5:38:34 PM	Bypass valve closed
3/14/2012	5:38:34 PM	Bubbler valve closed
3/14/2012	5:38:34 PM	Helium valve opened
3/14/2012	5:38:34 PM	Main Vac valve opened
3/14/2012	5:38:34 PM	Helium MFC set to  20.000000
3/14/2012	5:38:34 PM	H2 MFC set to  0.000000
3/14/2012	5:38:34 PM	BCl3 MFC set to  0.000000
3/14/2012	5:38:34 PM	PH3 MFC set to  0.000000
3/14/2012	5:38:34 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:38:34 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:38:35 PM	Tube furnace set to 0
3/14/2012	5:39:05 PM	Helium valve closed
3/14/2012	5:39:05 PM	H2 valve closed
3/14/2012	5:39:05 PM	BCl3 valve closed
3/14/2012	5:39:05 PM	PH3 valve closed
3/14/2012	5:39:05 PM	SiCl4 pre valve closed
3/14/2012	5:39:05 PM	SiCl4 post valve closed
3/14/2012	5:39:05 PM	Bypass valve closed
3/14/2012	5:39:05 PM	Bubbler valve closed
3/14/2012	5:39:05 PM	Main Vac valve opened
3/14/2012	5:39:05 PM	Helium MFC set to  0.000000
3/14/2012	5:39:05 PM	H2 MFC set to  0.000000
3/14/2012	5:39:05 PM	BCl3 MFC set to  0.000000
3/14/2012	5:39:05 PM	PH3 MFC set to  0.000000
3/14/2012	5:39:05 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:39:05 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:39:05 PM	Tube furnace set to 0
3/14/2012	5:39:35 PM	H2 valve closed
3/14/2012	5:39:35 PM	BCl3 valve closed
3/14/2012	5:39:35 PM	PH3 valve closed
3/14/2012	5:39:35 PM	SiCl4 pre valve closed
3/14/2012	5:39:35 PM	SiCl4 post valve closed
3/14/2012	5:39:35 PM	Bypass valve closed
3/14/2012	5:39:35 PM	Bubbler valve closed
3/14/2012	5:39:35 PM	Helium valve opened
3/14/2012	5:39:35 PM	Main Vac valve opened
3/14/2012	5:39:35 PM	Helium MFC set to  20.000000
3/14/2012	5:39:35 PM	H2 MFC set to  0.000000
3/14/2012	5:39:35 PM	BCl3 MFC set to  0.000000
3/14/2012	5:39:35 PM	PH3 MFC set to  0.000000
3/14/2012	5:39:35 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:39:35 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:39:35 PM	Tube furnace set to 0
3/14/2012	5:40:05 PM	Helium valve closed
3/14/2012	5:40:05 PM	H2 valve closed
3/14/2012	5:40:05 PM	BCl3 valve closed
3/14/2012	5:40:05 PM	PH3 valve closed
3/14/2012	5:40:05 PM	SiCl4 pre valve closed
3/14/2012	5:40:05 PM	SiCl4 post valve closed
3/14/2012	5:40:05 PM	Bypass valve closed
3/14/2012	5:40:05 PM	Bubbler valve closed
3/14/2012	5:40:05 PM	Main Vac valve opened
3/14/2012	5:40:05 PM	Helium MFC set to  0.000000
3/14/2012	5:40:05 PM	H2 MFC set to  0.000000
3/14/2012	5:40:05 PM	BCl3 MFC set to  0.000000
3/14/2012	5:40:05 PM	PH3 MFC set to  0.000000
3/14/2012	5:40:05 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:40:05 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:40:05 PM	Tube furnace set to 0
3/14/2012	5:40:35 PM	H2 valve closed
3/14/2012	5:40:35 PM	BCl3 valve closed
3/14/2012	5:40:35 PM	PH3 valve closed
3/14/2012	5:40:35 PM	SiCl4 pre valve closed
3/14/2012	5:40:35 PM	SiCl4 post valve closed
3/14/2012	5:40:35 PM	Bypass valve closed
3/14/2012	5:40:35 PM	Bubbler valve closed
3/14/2012	5:40:35 PM	Helium valve opened
3/14/2012	5:40:35 PM	Main Vac valve opened
3/14/2012	5:40:35 PM	Helium MFC set to  20.000000
3/14/2012	5:40:35 PM	H2 MFC set to  0.000000
3/14/2012	5:40:35 PM	BCl3 MFC set to  0.000000
3/14/2012	5:40:35 PM	PH3 MFC set to  0.000000
3/14/2012	5:40:35 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:40:35 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:40:35 PM	Tube furnace set to 0
3/14/2012	5:41:05 PM	Helium valve closed
3/14/2012	5:41:05 PM	H2 valve closed
3/14/2012	5:41:05 PM	BCl3 valve closed
3/14/2012	5:41:05 PM	PH3 valve closed
3/14/2012	5:41:05 PM	SiCl4 pre valve closed
3/14/2012	5:41:05 PM	SiCl4 post valve closed
3/14/2012	5:41:05 PM	Bypass valve closed
3/14/2012	5:41:05 PM	Bubbler valve closed
3/14/2012	5:41:05 PM	Main Vac valve opened
3/14/2012	5:41:05 PM	Helium MFC set to  0.000000
3/14/2012	5:41:06 PM	H2 MFC set to  0.000000
3/14/2012	5:41:06 PM	BCl3 MFC set to  0.000000
3/14/2012	5:41:06 PM	PH3 MFC set to  0.000000
3/14/2012	5:41:06 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:41:06 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:41:06 PM	Tube furnace set to 0
3/14/2012	5:41:36 PM	H2 valve closed
3/14/2012	5:41:36 PM	BCl3 valve closed
3/14/2012	5:41:36 PM	PH3 valve closed
3/14/2012	5:41:36 PM	SiCl4 pre valve closed
3/14/2012	5:41:36 PM	SiCl4 post valve closed
3/14/2012	5:41:36 PM	Bypass valve closed
3/14/2012	5:41:36 PM	Bubbler valve closed
3/14/2012	5:41:36 PM	Helium valve opened
3/14/2012	5:41:36 PM	Main Vac valve opened
3/14/2012	5:41:36 PM	Helium MFC set to  20.000000
3/14/2012	5:41:36 PM	H2 MFC set to  0.000000
3/14/2012	5:41:36 PM	BCl3 MFC set to  0.000000
3/14/2012	5:41:36 PM	PH3 MFC set to  0.000000
3/14/2012	5:41:36 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:41:36 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:41:36 PM	Tube furnace set to 0
3/14/2012	5:42:06 PM	Helium valve closed
3/14/2012	5:42:06 PM	H2 valve closed
3/14/2012	5:42:06 PM	BCl3 valve closed
3/14/2012	5:42:06 PM	PH3 valve closed
3/14/2012	5:42:06 PM	SiCl4 pre valve closed
3/14/2012	5:42:06 PM	SiCl4 post valve closed
3/14/2012	5:42:06 PM	Bypass valve closed
3/14/2012	5:42:06 PM	Bubbler valve closed
3/14/2012	5:42:06 PM	Main Vac valve opened
3/14/2012	5:42:06 PM	Helium MFC set to  0.000000
3/14/2012	5:42:06 PM	H2 MFC set to  0.000000
3/14/2012	5:42:06 PM	BCl3 MFC set to  0.000000
3/14/2012	5:42:06 PM	PH3 MFC set to  0.000000
3/14/2012	5:42:06 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:42:06 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:42:06 PM	Tube furnace set to 0
3/14/2012	5:42:36 PM	H2 valve closed
3/14/2012	5:42:36 PM	BCl3 valve closed
3/14/2012	5:42:36 PM	PH3 valve closed
3/14/2012	5:42:36 PM	SiCl4 pre valve closed
3/14/2012	5:42:36 PM	SiCl4 post valve closed
3/14/2012	5:42:36 PM	Bypass valve closed
3/14/2012	5:42:36 PM	Bubbler valve closed
3/14/2012	5:42:36 PM	Helium valve opened
3/14/2012	5:42:36 PM	Main Vac valve opened
3/14/2012	5:42:36 PM	Helium MFC set to  20.000000
3/14/2012	5:42:36 PM	H2 MFC set to  0.000000
3/14/2012	5:42:36 PM	BCl3 MFC set to  0.000000
3/14/2012	5:42:36 PM	PH3 MFC set to  0.000000
3/14/2012	5:42:36 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:42:36 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:42:36 PM	Tube furnace set to 0
3/14/2012	5:43:06 PM	Helium valve closed
3/14/2012	5:43:06 PM	H2 valve closed
3/14/2012	5:43:06 PM	BCl3 valve closed
3/14/2012	5:43:06 PM	PH3 valve closed
3/14/2012	5:43:06 PM	SiCl4 pre valve closed
3/14/2012	5:43:06 PM	SiCl4 post valve closed
3/14/2012	5:43:06 PM	Bypass valve closed
3/14/2012	5:43:06 PM	Bubbler valve closed
3/14/2012	5:43:06 PM	Main Vac valve opened
3/14/2012	5:43:06 PM	Helium MFC set to  0.000000
3/14/2012	5:43:06 PM	H2 MFC set to  0.000000
3/14/2012	5:43:06 PM	BCl3 MFC set to  0.000000
3/14/2012	5:43:06 PM	PH3 MFC set to  0.000000
3/14/2012	5:43:06 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:43:06 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:43:07 PM	Tube furnace set to 0
3/14/2012	5:43:37 PM	H2 valve closed
3/14/2012	5:43:37 PM	BCl3 valve closed
3/14/2012	5:43:37 PM	PH3 valve closed
3/14/2012	5:43:37 PM	SiCl4 pre valve closed
3/14/2012	5:43:37 PM	SiCl4 post valve closed
3/14/2012	5:43:37 PM	Bypass valve closed
3/14/2012	5:43:37 PM	Bubbler valve closed
3/14/2012	5:43:37 PM	Helium valve opened
3/14/2012	5:43:37 PM	Main Vac valve opened
3/14/2012	5:43:37 PM	Helium MFC set to  20.000000
3/14/2012	5:43:37 PM	H2 MFC set to  0.000000
3/14/2012	5:43:37 PM	BCl3 MFC set to  0.000000
3/14/2012	5:43:37 PM	PH3 MFC set to  0.000000
3/14/2012	5:43:37 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:43:37 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:43:37 PM	Tube furnace set to 0
3/14/2012	5:44:07 PM	Helium valve closed
3/14/2012	5:44:07 PM	H2 valve closed
3/14/2012	5:44:07 PM	BCl3 valve closed
3/14/2012	5:44:07 PM	PH3 valve closed
3/14/2012	5:44:07 PM	SiCl4 pre valve closed
3/14/2012	5:44:07 PM	SiCl4 post valve closed
3/14/2012	5:44:07 PM	Bypass valve closed
3/14/2012	5:44:07 PM	Bubbler valve closed
3/14/2012	5:44:07 PM	Main Vac valve opened
3/14/2012	5:44:07 PM	Helium MFC set to  0.000000
3/14/2012	5:44:07 PM	H2 MFC set to  0.000000
3/14/2012	5:44:07 PM	BCl3 MFC set to  0.000000
3/14/2012	5:44:07 PM	PH3 MFC set to  0.000000
3/14/2012	5:44:07 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:44:07 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:44:07 PM	Tube furnace set to 0
3/14/2012	5:44:37 PM	H2 valve closed
3/14/2012	5:44:37 PM	BCl3 valve closed
3/14/2012	5:44:37 PM	PH3 valve closed
3/14/2012	5:44:37 PM	SiCl4 pre valve closed
3/14/2012	5:44:37 PM	SiCl4 post valve closed
3/14/2012	5:44:37 PM	Bypass valve closed
3/14/2012	5:44:37 PM	Bubbler valve closed
3/14/2012	5:44:37 PM	Helium valve opened
3/14/2012	5:44:37 PM	Main Vac valve opened
3/14/2012	5:44:37 PM	Helium MFC set to  20.000000
3/14/2012	5:44:37 PM	H2 MFC set to  0.000000
3/14/2012	5:44:37 PM	BCl3 MFC set to  0.000000
3/14/2012	5:44:37 PM	PH3 MFC set to  0.000000
3/14/2012	5:44:37 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:44:37 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:44:37 PM	Tube furnace set to 0
3/14/2012	5:45:07 PM	Helium valve closed
3/14/2012	5:45:07 PM	H2 valve closed
3/14/2012	5:45:07 PM	BCl3 valve closed
3/14/2012	5:45:07 PM	PH3 valve closed
3/14/2012	5:45:07 PM	SiCl4 pre valve closed
3/14/2012	5:45:07 PM	SiCl4 post valve closed
3/14/2012	5:45:07 PM	Bypass valve closed
3/14/2012	5:45:07 PM	Bubbler valve closed
3/14/2012	5:45:07 PM	Main Vac valve opened
3/14/2012	5:45:07 PM	Helium MFC set to  0.000000
3/14/2012	5:45:07 PM	H2 MFC set to  0.000000
3/14/2012	5:45:07 PM	BCl3 MFC set to  0.000000
3/14/2012	5:45:07 PM	PH3 MFC set to  0.000000
3/14/2012	5:45:07 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:45:07 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:45:07 PM	Tube furnace set to 0
3/14/2012	5:45:37 PM	H2 valve closed
3/14/2012	5:45:37 PM	BCl3 valve closed
3/14/2012	5:45:37 PM	PH3 valve closed
3/14/2012	5:45:37 PM	SiCl4 pre valve closed
3/14/2012	5:45:37 PM	SiCl4 post valve closed
3/14/2012	5:45:37 PM	Bypass valve closed
3/14/2012	5:45:37 PM	Bubbler valve closed
3/14/2012	5:45:37 PM	Helium valve opened
3/14/2012	5:45:37 PM	Main Vac valve opened
3/14/2012	5:45:37 PM	Helium MFC set to  20.000000
3/14/2012	5:45:37 PM	H2 MFC set to  0.000000
3/14/2012	5:45:37 PM	BCl3 MFC set to  0.000000
3/14/2012	5:45:37 PM	PH3 MFC set to  0.000000
3/14/2012	5:45:37 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:45:37 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:45:38 PM	Tube furnace set to 0
3/14/2012	5:46:08 PM	Helium valve closed
3/14/2012	5:46:08 PM	H2 valve closed
3/14/2012	5:46:08 PM	BCl3 valve closed
3/14/2012	5:46:08 PM	PH3 valve closed
3/14/2012	5:46:08 PM	SiCl4 pre valve closed
3/14/2012	5:46:08 PM	SiCl4 post valve closed
3/14/2012	5:46:08 PM	Bypass valve closed
3/14/2012	5:46:08 PM	Bubbler valve closed
3/14/2012	5:46:08 PM	Main Vac valve opened
3/14/2012	5:46:08 PM	Helium MFC set to  0.000000
3/14/2012	5:46:08 PM	H2 MFC set to  0.000000
3/14/2012	5:46:08 PM	BCl3 MFC set to  0.000000
3/14/2012	5:46:08 PM	PH3 MFC set to  0.000000
3/14/2012	5:46:08 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:46:08 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:46:08 PM	Tube furnace set to 0
3/14/2012	5:46:38 PM	H2 valve closed
3/14/2012	5:46:38 PM	BCl3 valve closed
3/14/2012	5:46:38 PM	PH3 valve closed
3/14/2012	5:46:38 PM	SiCl4 pre valve closed
3/14/2012	5:46:38 PM	SiCl4 post valve closed
3/14/2012	5:46:38 PM	Bypass valve closed
3/14/2012	5:46:38 PM	Bubbler valve closed
3/14/2012	5:46:38 PM	Helium valve opened
3/14/2012	5:46:38 PM	Main Vac valve opened
3/14/2012	5:46:38 PM	Helium MFC set to  20.000000
3/14/2012	5:46:38 PM	H2 MFC set to  0.000000
3/14/2012	5:46:38 PM	BCl3 MFC set to  0.000000
3/14/2012	5:46:38 PM	PH3 MFC set to  0.000000
3/14/2012	5:46:38 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:46:38 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:46:38 PM	Tube furnace set to 0
3/14/2012	5:47:08 PM	Helium valve closed
3/14/2012	5:47:08 PM	H2 valve closed
3/14/2012	5:47:08 PM	BCl3 valve closed
3/14/2012	5:47:08 PM	PH3 valve closed
3/14/2012	5:47:08 PM	SiCl4 pre valve closed
3/14/2012	5:47:08 PM	SiCl4 post valve closed
3/14/2012	5:47:08 PM	Bypass valve closed
3/14/2012	5:47:08 PM	Bubbler valve closed
3/14/2012	5:47:08 PM	Main Vac valve opened
3/14/2012	5:47:08 PM	Helium MFC set to  0.000000
3/14/2012	5:47:08 PM	H2 MFC set to  0.000000
3/14/2012	5:47:08 PM	BCl3 MFC set to  0.000000
3/14/2012	5:47:08 PM	PH3 MFC set to  0.000000
3/14/2012	5:47:08 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:47:08 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:47:08 PM	Tube furnace set to 0
3/14/2012	5:47:38 PM	H2 valve closed
3/14/2012	5:47:38 PM	BCl3 valve closed
3/14/2012	5:47:38 PM	PH3 valve closed
3/14/2012	5:47:38 PM	SiCl4 pre valve closed
3/14/2012	5:47:38 PM	SiCl4 post valve closed
3/14/2012	5:47:38 PM	Bypass valve closed
3/14/2012	5:47:38 PM	Bubbler valve closed
3/14/2012	5:47:38 PM	Helium valve opened
3/14/2012	5:47:38 PM	Main Vac valve opened
3/14/2012	5:47:38 PM	Helium MFC set to  20.000000
3/14/2012	5:47:38 PM	H2 MFC set to  0.000000
3/14/2012	5:47:38 PM	BCl3 MFC set to  0.000000
3/14/2012	5:47:38 PM	PH3 MFC set to  0.000000
3/14/2012	5:47:38 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:47:38 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:47:38 PM	Tube furnace set to 0
3/14/2012	5:48:08 PM	Helium valve closed
3/14/2012	5:48:08 PM	H2 valve closed
3/14/2012	5:48:08 PM	BCl3 valve closed
3/14/2012	5:48:08 PM	PH3 valve closed
3/14/2012	5:48:08 PM	SiCl4 pre valve closed
3/14/2012	5:48:08 PM	SiCl4 post valve closed
3/14/2012	5:48:08 PM	Bypass valve closed
3/14/2012	5:48:09 PM	Bubbler valve closed
3/14/2012	5:48:09 PM	Main Vac valve opened
3/14/2012	5:48:09 PM	Helium MFC set to  0.000000
3/14/2012	5:48:09 PM	H2 MFC set to  0.000000
3/14/2012	5:48:09 PM	BCl3 MFC set to  0.000000
3/14/2012	5:48:09 PM	PH3 MFC set to  0.000000
3/14/2012	5:48:09 PM	SiCl4 MFC set to  0.000000
3/14/2012	5:48:09 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	5:48:09 PM	Tube furnace set to 0
3/14/2012	5:48:10 PM	Run finished at 5:48 PM
3/14/2012	5:48:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/14/2012	6:02:12 PM	Main Vac valve closed
3/14/2012	6:02:29 PM	Main Vac valve opened
3/14/2012	6:03:21 PM	Recipe started at 6:03 PM
3/14/2012	6:03:21 PM	Helium valve closed
3/14/2012	6:03:21 PM	H2 valve closed
3/14/2012	6:03:21 PM	BCl3 valve closed
3/14/2012	6:03:21 PM	PH3 valve closed
3/14/2012	6:03:21 PM	SiCl4 pre valve closed
3/14/2012	6:03:21 PM	SiCl4 post valve closed
3/14/2012	6:03:21 PM	Main Vac valve closed
3/14/2012	6:03:21 PM	Bypass valve closed
3/14/2012	6:03:21 PM	Bubbler valve closed
3/14/2012	6:03:21 PM	Helium MFC set to  0.000000
3/14/2012	6:03:21 PM	H2 MFC set to  0.000000
3/14/2012	6:03:21 PM	BCl3 MFC set to  0.000000
3/14/2012	6:03:21 PM	PH3 MFC set to  0.000000
3/14/2012	6:03:21 PM	SiCl4 MFC set to  0.000000
3/14/2012	6:03:21 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	6:03:21 PM	Tube furnace set to 0
3/14/2012	6:03:24 PM	Helium valve closed
3/14/2012	6:03:24 PM	BCl3 valve closed
3/14/2012	6:03:24 PM	PH3 valve closed
3/14/2012	6:03:24 PM	SiCl4 pre valve closed
3/14/2012	6:03:24 PM	SiCl4 post valve closed
3/14/2012	6:03:24 PM	Main Vac valve closed
3/14/2012	6:03:24 PM	Bypass valve closed
3/14/2012	6:03:24 PM	Bubbler valve closed
3/14/2012	6:03:24 PM	H2 valve opened
3/14/2012	6:03:24 PM	Helium MFC set to  0.000000
3/14/2012	6:03:24 PM	H2 MFC set to  500.000000
3/14/2012	6:03:24 PM	BCl3 MFC set to  0.000000
3/14/2012	6:03:24 PM	PH3 MFC set to  0.000000
3/14/2012	6:03:24 PM	SiCl4 MFC set to  0.000000
3/14/2012	6:03:24 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	6:03:24 PM	Tube furnace set to 0
3/14/2012	6:04:30 PM	Helium valve closed
3/14/2012	6:04:30 PM	BCl3 valve closed
3/14/2012	6:04:30 PM	PH3 valve closed
3/14/2012	6:04:30 PM	SiCl4 pre valve closed
3/14/2012	6:04:30 PM	SiCl4 post valve closed
3/14/2012	6:04:30 PM	Main Vac valve closed
3/14/2012	6:04:30 PM	Bypass valve closed
3/14/2012	6:04:30 PM	H2 valve opened
3/14/2012	6:04:30 PM	Bubbler valve opened
3/14/2012	6:04:30 PM	Helium MFC set to  0.000000
3/14/2012	6:04:30 PM	H2 MFC set to  500.000000
3/14/2012	6:04:30 PM	BCl3 MFC set to  0.000000
3/14/2012	6:04:30 PM	PH3 MFC set to  0.000000
3/14/2012	6:04:30 PM	SiCl4 MFC set to  0.000000
3/14/2012	6:04:30 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	6:04:30 PM	Tube furnace set to 0
3/14/2012	6:04:31 PM	Helium valve closed
3/14/2012	6:04:31 PM	BCl3 valve closed
3/14/2012	6:04:31 PM	PH3 valve closed
3/14/2012	6:04:31 PM	SiCl4 pre valve closed
3/14/2012	6:04:31 PM	SiCl4 post valve closed
3/14/2012	6:04:31 PM	Main Vac valve closed
3/14/2012	6:04:31 PM	Bypass valve closed
3/14/2012	6:04:31 PM	H2 valve opened
3/14/2012	6:04:31 PM	Bubbler valve opened
3/14/2012	6:04:31 PM	Helium MFC set to  0.000000
3/14/2012	6:04:31 PM	H2 MFC set to  500.000000
3/14/2012	6:04:31 PM	BCl3 MFC set to  0.000000
3/14/2012	6:04:31 PM	PH3 MFC set to  0.000000
3/14/2012	6:04:31 PM	SiCl4 MFC set to  0.000000
3/14/2012	6:04:31 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	6:04:31 PM	Tube furnace set to 950
3/14/2012	6:19:31 PM	Helium valve closed
3/14/2012	6:19:31 PM	PH3 valve closed
3/14/2012	6:19:31 PM	SiCl4 pre valve closed
3/14/2012	6:19:31 PM	SiCl4 post valve closed
3/14/2012	6:19:31 PM	Main Vac valve closed
3/14/2012	6:19:31 PM	Bypass valve closed
3/14/2012	6:19:31 PM	H2 valve opened
3/14/2012	6:19:31 PM	BCl3 valve opened
3/14/2012	6:19:31 PM	Bubbler valve opened
3/14/2012	6:19:31 PM	Helium MFC set to  0.000000
3/14/2012	6:19:31 PM	H2 MFC set to  400.000000
3/14/2012	6:19:31 PM	BCl3 MFC set to  20.000000
3/14/2012	6:19:31 PM	PH3 MFC set to  0.000000
3/14/2012	6:19:31 PM	SiCl4 MFC set to  0.000000
3/14/2012	6:19:31 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	6:19:31 PM	Tube furnace set to 950
3/14/2012	6:49:31 PM	Helium valve closed
3/14/2012	6:49:31 PM	BCl3 valve closed
3/14/2012	6:49:31 PM	PH3 valve closed
3/14/2012	6:49:31 PM	SiCl4 pre valve closed
3/14/2012	6:49:31 PM	SiCl4 post valve closed
3/14/2012	6:49:31 PM	Main Vac valve closed
3/14/2012	6:49:31 PM	Bypass valve closed
3/14/2012	6:49:31 PM	H2 valve opened
3/14/2012	6:49:31 PM	Bubbler valve opened
3/14/2012	6:49:31 PM	Helium MFC set to  0.000000
3/14/2012	6:49:31 PM	H2 MFC set to  500.000000
3/14/2012	6:49:31 PM	BCl3 MFC set to  0.000000
3/14/2012	6:49:31 PM	PH3 MFC set to  0.000000
3/14/2012	6:49:31 PM	SiCl4 MFC set to  0.000000
3/14/2012	6:49:31 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	6:49:31 PM	Tube furnace set to 750
3/14/2012	6:54:31 PM	H2 valve closed
3/14/2012	6:54:31 PM	BCl3 valve closed
3/14/2012	6:54:31 PM	PH3 valve closed
3/14/2012	6:54:31 PM	SiCl4 pre valve closed
3/14/2012	6:54:31 PM	SiCl4 post valve closed
3/14/2012	6:54:31 PM	Main Vac valve closed
3/14/2012	6:54:31 PM	Bypass valve closed
3/14/2012	6:54:31 PM	Helium valve opened
3/14/2012	6:54:31 PM	Bubbler valve opened
3/14/2012	6:54:31 PM	Helium MFC set to  500.000000
3/14/2012	6:54:31 PM	H2 MFC set to  0.000000
3/14/2012	6:54:31 PM	BCl3 MFC set to  0.000000
3/14/2012	6:54:31 PM	PH3 MFC set to  0.000000
3/14/2012	6:54:31 PM	SiCl4 MFC set to  0.000000
3/14/2012	6:54:32 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	6:54:32 PM	Tube furnace set to 0
3/14/2012	7:14:32 PM	Helium valve closed
3/14/2012	7:14:32 PM	H2 valve closed
3/14/2012	7:14:32 PM	BCl3 valve closed
3/14/2012	7:14:32 PM	PH3 valve closed
3/14/2012	7:14:32 PM	SiCl4 pre valve closed
3/14/2012	7:14:32 PM	SiCl4 post valve closed
3/14/2012	7:14:32 PM	Main Vac valve closed
3/14/2012	7:14:32 PM	Bypass valve closed
3/14/2012	7:14:32 PM	Bubbler valve closed
3/14/2012	7:14:32 PM	Helium MFC set to  0.000000
3/14/2012	7:14:32 PM	H2 MFC set to  0.000000
3/14/2012	7:14:32 PM	BCl3 MFC set to  0.000000
3/14/2012	7:14:32 PM	PH3 MFC set to  0.000000
3/14/2012	7:14:32 PM	SiCl4 MFC set to  0.000000
3/14/2012	7:14:32 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	7:14:32 PM	Tube furnace set to 0
3/14/2012	7:14:33 PM	Run finished at 7:14 PM
3/14/2012	7:54:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2012	7:54:19 PM	Recipe started at 7:54 PM
3/14/2012	7:54:19 PM	Helium valve closed
3/14/2012	7:54:19 PM	H2 valve closed
3/14/2012	7:54:19 PM	BCl3 valve closed
3/14/2012	7:54:19 PM	PH3 valve closed
3/14/2012	7:54:19 PM	SiCl4 pre valve closed
3/14/2012	7:54:19 PM	SiCl4 post valve closed
3/14/2012	7:54:19 PM	Main Vac valve closed
3/14/2012	7:54:19 PM	Bypass valve closed
3/14/2012	7:54:19 PM	Bubbler valve closed
3/14/2012	7:54:19 PM	Helium MFC set to  0.000000
3/14/2012	7:54:19 PM	H2 MFC set to  0.000000
3/14/2012	7:54:19 PM	BCl3 MFC set to  0.000000
3/14/2012	7:54:19 PM	PH3 MFC set to  0.000000
3/14/2012	7:54:19 PM	SiCl4 MFC set to  0.000000
3/14/2012	7:54:19 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	7:54:19 PM	Tube furnace set to 0
3/14/2012	7:54:22 PM	H2 valve closed
3/14/2012	7:54:22 PM	BCl3 valve closed
3/14/2012	7:54:22 PM	PH3 valve closed
3/14/2012	7:54:22 PM	SiCl4 pre valve closed
3/14/2012	7:54:22 PM	SiCl4 post valve closed
3/14/2012	7:54:22 PM	Main Vac valve closed
3/14/2012	7:54:22 PM	Bypass valve closed
3/14/2012	7:54:22 PM	Bubbler valve closed
3/14/2012	7:54:22 PM	Helium valve opened
3/14/2012	7:54:22 PM	Helium MFC set to  500.000000
3/14/2012	7:54:22 PM	H2 MFC set to  0.000000
3/14/2012	7:54:22 PM	BCl3 MFC set to  0.000000
3/14/2012	7:54:22 PM	PH3 MFC set to  0.000000
3/14/2012	7:54:22 PM	SiCl4 MFC set to  0.000000
3/14/2012	7:54:22 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	7:54:22 PM	Tube furnace set to 0
3/14/2012	7:54:23 PM	Helium valve closed
3/14/2012	7:54:23 PM	H2 valve closed
3/14/2012	7:54:23 PM	BCl3 valve closed
3/14/2012	7:54:23 PM	PH3 valve closed
3/14/2012	7:54:23 PM	SiCl4 pre valve closed
3/14/2012	7:54:23 PM	SiCl4 post valve closed
3/14/2012	7:54:23 PM	Main Vac valve closed
3/14/2012	7:54:23 PM	Bypass valve closed
3/14/2012	7:54:23 PM	Bubbler valve closed
3/14/2012	7:54:23 PM	Helium MFC set to  0.000000
3/14/2012	7:54:23 PM	H2 MFC set to  0.000000
3/14/2012	7:54:23 PM	BCl3 MFC set to  0.000000
3/14/2012	7:54:23 PM	PH3 MFC set to  0.000000
3/14/2012	7:54:23 PM	SiCl4 MFC set to  0.000000
3/14/2012	7:54:23 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	7:54:23 PM	Tube furnace set to 0
3/14/2012	7:54:24 PM	Run finished at 7:54 PM
3/14/2012	7:54:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2012	7:56:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2012	7:56:20 PM	Recipe started at 7:56 PM
3/14/2012	7:56:20 PM	Helium valve closed
3/14/2012	7:56:20 PM	H2 valve closed
3/14/2012	7:56:20 PM	BCl3 valve closed
3/14/2012	7:56:20 PM	PH3 valve closed
3/14/2012	7:56:20 PM	SiCl4 pre valve closed
3/14/2012	7:56:20 PM	SiCl4 post valve closed
3/14/2012	7:56:20 PM	Main Vac valve closed
3/14/2012	7:56:20 PM	Bubbler valve closed
3/14/2012	7:56:20 PM	Bypass valve opened
3/14/2012	7:56:20 PM	Helium MFC set to  0.000000
3/14/2012	7:56:20 PM	H2 MFC set to  0.000000
3/14/2012	7:56:20 PM	BCl3 MFC set to  0.000000
3/14/2012	7:56:20 PM	PH3 MFC set to  0.000000
3/14/2012	7:56:20 PM	SiCl4 MFC set to  0.000000
3/14/2012	7:56:20 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	7:56:20 PM	Tube furnace set to 0
3/14/2012	7:57:18 PM	Helium valve closed
3/14/2012	7:57:18 PM	H2 valve closed
3/14/2012	7:57:18 PM	BCl3 valve closed
3/14/2012	7:57:18 PM	PH3 valve closed
3/14/2012	7:57:18 PM	SiCl4 pre valve closed
3/14/2012	7:57:18 PM	SiCl4 post valve closed
3/14/2012	7:57:18 PM	Main Vac valve closed
3/14/2012	7:57:18 PM	Bubbler valve closed
3/14/2012	7:57:18 PM	Bypass valve opened
3/14/2012	7:57:18 PM	Helium MFC set to  0.000000
3/14/2012	7:57:18 PM	H2 MFC set to  0.000000
3/14/2012	7:57:18 PM	BCl3 MFC set to  0.000000
3/14/2012	7:57:18 PM	PH3 MFC set to  0.000000
3/14/2012	7:57:18 PM	SiCl4 MFC set to  0.000000
3/14/2012	7:57:18 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	7:57:18 PM	Tube furnace set to 0
3/14/2012	7:58:18 PM	Helium valve closed
3/14/2012	7:58:18 PM	H2 valve closed
3/14/2012	7:58:18 PM	BCl3 valve closed
3/14/2012	7:58:18 PM	PH3 valve closed
3/14/2012	7:58:18 PM	SiCl4 pre valve closed
3/14/2012	7:58:18 PM	SiCl4 post valve closed
3/14/2012	7:58:18 PM	Bypass valve closed
3/14/2012	7:58:18 PM	Bubbler valve closed
3/14/2012	7:58:18 PM	Main Vac valve opened
3/14/2012	7:58:18 PM	Helium MFC set to  0.000000
3/14/2012	7:58:18 PM	H2 MFC set to  0.000000
3/14/2012	7:58:18 PM	BCl3 MFC set to  0.000000
3/14/2012	7:58:18 PM	PH3 MFC set to  0.000000
3/14/2012	7:58:18 PM	SiCl4 MFC set to  0.000000
3/14/2012	7:58:18 PM	Bypass solenoid MFC set to  0.000000
3/14/2012	7:58:19 PM	Tube furnace set to 0
3/14/2012	7:58:20 PM	Run finished at 7:58 PM
3/14/2012	7:58:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
